| Annealing |
| Name |
Location |
Contact |
Operational Status |
Annealing Furnace, Multipurpose
| FabLab | Thomas Loughran | ● Online |
| Backside |
| Name |
Location |
Contact |
Operational Status |
SPECIAL: coin cell battery with ALD-protected electrode
| ANSLab | | ● Online |
Dicing Saw B - Microautomation
| FabLab | John Abrahams | ● Offline |
Glove Box - Exploratory Lab
| FabLab | Mark Lecates | ● Online |
3-D Printer
| Fisher-Lab | Shannon McLoughlin | ● Offline |
Wire Bonder - FABLAB West Bond 7KE
| FabLab | John Abrahams | ● Online |
Dicing Saw A - Microautomation
| FabLab | John Abrahams | ● Online |
| Deposition |
| Name |
Location |
Contact |
Operational Status |
Ultratech Fiji 200 ALD system Mario
| ANSLab | | ● Waiting for part/service |
Ultratech Fiji 200 ALD system Luigi
| ANSLab | | ● Online |
In-situ sensing in Fiji ALD systems (Mario, Luigi)
| ANSLab | | ● Online |
RTA-610
| FabLab | John Abrahams | ● Online |
Beneq Atomic Layer Deposition System
| FabLab | John Abrahams | ● Online |
LP-CVD Furnace
| FabLab | Thomas Loughran | ● Online |
Tystar CVD
| FabLab | Thomas Loughran | ● Online |
Oxford PECVD
| FabLab | Thomas Loughran | ● Online |
AJA ATC 1800 Sputtering unit
| FabLab | Jonathan Hummel | ● Online |
Metra Thermal Evaporator
| FabLab | Thomas Loughran | ● Online |
Denton Ebeam/thermal evaporator
| FabLab | Thomas Loughran | ● Waiting for part/service |
Denton DV-502A carbon evaporator
| FabLab | Jonathan Hummel | ● In maintenance |
Parylene Coater
| FabLab | Mark Lecates | ● Online |
Angstrom NexDep Ebeam evaporator
| FabLab | Mark Lecates | ● Online |
Angstrom Ebeam Evaporator PLC Driven -B
| FabLab | Mark Lecates | ● Online |
AJA ATC Orion 8 Sputtering system
| FabLab | Jonathan Hummel | ● Online |
III-V MOCVD Material Growth
| UMBC | Fow-Sen Choa | ● Online |
| Etching |
| Name |
Location |
Contact |
Operational Status |
Etch tunnel Acid Bench 1
| FabLab | FabLab Staff | ● Online |
Etch tunnel Acid Bench 2
| FabLab | FabLab Staff | ● Online |
Etch tunnel Caustic/Base Bench
| FabLab | FabLab Staff | ● Online |
Etch tunnel Solvent Bench
| FabLab | FabLab Staff | ● Online |
Trion RIE
| FabLab | Mark Lecates | ● Online |
Oxford ICP Etcher(Chlorine)
| FabLab | Thomas Loughran | ● Online |
Teaching Lab Acid Wet Bench
| FabLab | FabLab Staff | ● Online |
Teaching Lab Caustic/Solvent Wet Bench
| FabLab | FabLab Staff | ● Online |
Sample Preb Wet Bench
| FabLab | Mark Lecates | ● Online |
Furnace Preclean Web Bench
| FabLab | FabLab Staff | ● Online |
Critical Point Dryer
| FabLab | Jonathan Hummel | ● Online |
Oxford Etcher (Fluorine)
| FabLab | Mark Lecates | ● Offline |
XactiX Xenon Difluoride Etcher
| FabLab | Jonathan Hummel | ● Offline |
Exploratory Lab Wet Bench
| FabLab | FabLab Staff | ● Online |
| Lithography |
| Name |
Location |
Contact |
Operational Status |
Raith e_LiNE
| FabLab | Jonathan Hummel | ● Online |
MJB-3 Mask aligner- right of spin station #1
| FabLab | John Abrahams | ● Online |
EVG 620 Mask Aligner
| FabLab | John Abrahams | ● In maintenance |
Photoresist Spin Station- Left- FABLAB-PWM32-Programable
| FabLab | John Abrahams | ● Online |
Photoresist Spin Station- Teaching Lab- 3
| FabLab | John Abrahams | ● Online |
Developing Bench
| FabLab | FabLab Staff | ● Online |
March O2 plasma system
| FabLab | Mark Lecates | ● Online |
Polymer Spin Station
| FabLab | Thomas Loughran | ● Online |
Raith off line computer
| FabLab | Jonathan Hummel | ● Online |
Photoresist Spin Station- Right- FABLAB-PWM32-Programable
| FabLab | John Abrahams | ● Online |
Spin Station- Laurell- SU-8 ONLY
| FabLab | John Abrahams | ● Online |
MA-4 Suss Mask Aligner
| FabLab | John Abrahams | ● Online |
MJB-3 Mask Aligner- Left of spin station #2
| FabLab | FabLab Staff | ● Online |
FABLAB Photo oven (Blue M)
| FabLab | FabLab Staff | ● Online |
Heidelberg MLA150 Maskless Aligner
| FabLab | Nam Kim | ● Online |
| Metrology |
| Name |
Location |
Contact |
Operational Status |
JEM 2100 FEG TEM/STEM
| AIM Lab | Wen-An Chiou | ● Online |
JXA 8900R Microprobe
| AIM Lab | Philip Piccoli | ● Online |
JEM 2100 LaB6 TEM
| AIM Lab | Wen-An Chiou | ● Online |
Hitachi SU-70 FEG SEM
| AIM Lab | Wen-An Chiou | ● Online |
Tescan GAIA FEG SEM
| AIM Lab | Jiancun Rao | ● Online |
Tescan GAIA FIB/SEM
| AIM Lab | Jiancun Rao | ● Online |
Tescan XEIA FEG SEM
| AIM Lab | Jiancun Rao | ● Online |
Tescan XEIA Plasma FIB/SEM
| AIM Lab | Jiancun Rao | ● Online |
Kratos UHV surface analysis system
| ANSLab | | ● Online |
ICPE-9000 ICP Atomic Emission Spectrometer
| EnvEngLab | Marya Anderson | ● Online |
TA Instruments DSC Q100
| FML | Patricia Gonzales | ● Online |
TA Instruments DMA Q800
| FML | Rebecca Fedderwitz | ● Online |
Waters GPC
| FML | Sahana Bhattacharyya | ● Waiting for part/service |
Ultramicrotome: Leica EM UC6
| FML | Kyle Ludwig | ● Online |
UV/Vis Spectrophotometer
| FML | Rebecca Fedderwitz | ● Online |
Microbalance: Sartorius ME-5
| FML | Kyle Ludwig | ● Online |
Hitachi S-3400 Variable Pressure SEM
| FabLab | Jonathan Hummel | ● Online |
Stress Measurement Tool
| FabLab | Thomas Loughran | ● Online |
N&K Spectrophotometer
| FabLab | John Abrahams | ● Online |
Microscope 1- Leitz Ergolux in Teaching Lab
| FabLab | FabLab Staff | ● Online |
Profilometer Tencor Alpha Step 200- Teaching Lab
| FabLab | Mark Lecates | ● Online |
Microscope 4- Leitz in FABLAB Photo Tunnel
| FabLab | FabLab Staff | ● Online |
Microscope 2- Nikon Optophot in Teaching Lab
| FabLab | FabLab Staff | ● Online |
Microscope 3- Zeiss in FABLAB Deposition Tunnel.
| FabLab | FabLab Staff | ● Online |
Probe Station I- with 4155C
| FabLab | John Abrahams | ● Online |
Hall Effect Measurement System
| FabLab | John Abrahams | ● Online |
Solar Cell Simulator
| FabLab | John Abrahams | ● Online |
Micromeritics ASAP 2020 Porosimeter Test Station
| FabLab | John Abrahams | ● Online |
Micromeritics ASAP 2020 Porosimeter Degas #1
| FabLab | John Abrahams | ● Online |
Micromeritics ASAP 2020 Porosimeter Degas #2
| FabLab | John Abrahams | ● Online |
Arbin BT2000 Battery Test Station
| FabLab | | ● Online |
Profilometer P-1 Long Scan Profiler
| FabLab | Mark Lecates | ● Online |
Woollam Spectroscopic Ellipsometer
| FabLab | John Abrahams | ● Online |
SHIMADZU IR Prestige21 FTIR Spectrometer
| FabLab | John Abrahams | ● Online |
Microanalytical High-Resolution Time-of-Flight Mass Spectrometer System
| NanoMass | | ● Online |
Microanalytical Ultrahigh-Resolution Orbitrap Mass Spectrometer System
| NanoMass | | ● Online |
Shimadzu FTIR Spectrophotomater
| FabLab | John Abrahams | ● Online |
H-J-Y Raman Microscope (Chemistry)
| SAC | Karen Gaskell | ● Online |
