| Operational Status | ● Online | |||||||||||||||
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| Description |
Targets 1-Ti, 2-V2O5, 3-W, 4-Li2O, 5-Cu, 6-Cr, 7-Li3PO4, 8-Al Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them.
First 2 hours of the run: $75/hr for UMCP NanoCenter members, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)
This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au).
Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges)
Precious metals surcharge(10/11):
Au & Pd: $82 per 1000A
Pt: $70 per 1000A |
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| Location | FabLab | FabLab Dep tunnel | |||||||||||||||
| Manufacturer |
AJA International ATC Orion 8 |
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| Staff Contact |
 Jonathan Hummeljhummel1@umd.edu 301 405-5017 |
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| Rates | UMD $75/hr External Non-profit / University $116/hr Small Commercial / MTECH $158/hr Large Commercial $220/hr No Charge $0/hr |
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| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
