June 28, 2023 UMD Home FabLab AIMLab
March O2 plasma system Back to Equipment List
Operational Status ● Online
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Jun 21, 2023
10:30 am - 10:45 am
Sydney Overton
View Reservation
Wed, Jun 14, 2023
3:30 pm - 3:45 pm
Sheron Lian
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Wed, Jun 07, 2023
1:00 pm - 1:15 pm
Sheron Lian
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Tue, May 23, 2023
7:30 pm - 7:45 pm
Deric Session
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Tue, May 23, 2023
3:15 pm - 3:30 pm
Sheron Lian
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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