June 28, 2023 UMD Home FabLab AIMLab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $92 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Jun 27, 2023
4:45 pm - 6:15 pm
Ruihao Ni
View Reservation
Mon, Jun 26, 2023
12:45 pm - 4:45 pm
Pranshoo Upadhyay
View Reservation
3nm Cr/ 70 nm Au; Au: 64.4 usd
Mon, Jun 26, 2023
9:15 am - 11:45 am
Samuel Deitemyer
View Reservation
Cr 15 nm
Thu, Jun 22, 2023
10:30 am - 1:00 pm
Samuel Deitemyer
View Reservation
Cr 20 nm
Wed, Jun 21, 2023
5:30 pm - 7:00 pm
Ruihao Ni
View Reservation
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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