June 28, 2023 UMD Home FabLab AIMLab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ● Online
Description

First 2 hours of the run:
$75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.

For runs over 2 hours:
$10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-ZnO, 2-HfO2, 3-In2O3/ZnO
Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(10/11):
Au: $82 per 1000A
Pt: $70 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
06/29/2023 08:00 PM 09:00 AM Stefan Theodoru
Logs
Thu, Jun 29, 2023
8:00 pm - 9:00 am
Stefan Theodoru
View Reservation
LiPON
Wed, Jun 28, 2023
2:00 pm - 3:30 pm
Po-Chun Huang
View Reservation
HfO2 ZnO and IZO
Tue, Jun 27, 2023
10:00 am - 10:00 am
Zoey Warecki
View Reservation
V and LiPON
Wed, Jun 21, 2023
2:30 pm - 2:45 pm
Andrew Evangelista
View Reservation
Silicon, Inconel.
Wed, Jun 21, 2023
10:00 am - 10:30 am
Liuxin Gu
View Reservation

Deleted by: Liuxin Gu

Pt(100nm)/Ag
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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