All Locations 1223B Chem Nuc Bldg2300 KIM (Bldg #225)CVD TunnelDEP TunnelDeposition TunnelDicing RoomElectrical Characterization LabETCH TunnelExploratory LabExploratory Lab SEM roomFabLabFabLab Dep tunnelFABLAB- Exploratory LabFront Hall of FABLABKim 2302Laboratory for Physical Sciences (LPS)Main Fab HallPhoto TunnelPhotolithography TunnelSolar Simulator LabSubfabTeaching LabTool Prep Area All Categories AnnealingBacksideDepositionEtchingLithographyMetrology

Annealing
	Name	Trainer
	Annealing Furnace, Multipurpose	Thomas Loughran

Backside
	Name	Trainer
	Dicing Saw B - Microautomation	John Abrahams
	Glove Box - Exploratory Lab	Mark Lecates
	Wire Bonder - FABLAB West Bond 7KE	John Abrahams
	Dicing Saw A - Microautomation	John Abrahams

Deposition
	Name	Trainer
	RTA-610	John Abrahams
	Beneq Atomic Layer Deposition System	John Abrahams
	Tystar CVD	Thomas Loughran
	Oxford PECVD	Thomas Loughran
	AJA ATC 1800 Sputtering unit	Jonathan Hummel
	Metra Thermal Evaporator	Thomas Loughran
	Denton Ebeam/thermal evaporator	Thomas Loughran
	Denton DV-502A carbon evaporator	Jonathan Hummel
	Parylene Coater	Mark Lecates
	Angstrom NexDep Ebeam evaporator	Mark Lecates
	Angstrom Ebeam Evaporator PLC Driven -B	Mark Lecates
	AJA ATC Orion 8 Sputtering system	Jonathan Hummel

Etching
	Name	Trainer
	Etch tunnel Acid Bench 1	FabLab Staff
	Etch tunnel Acid Bench 2	FabLab Staff
	Etch tunnel Caustic/Base Bench	FabLab Staff
	Etch tunnel Solvent Bench	FabLab Staff
	Trion RIE	Mark Lecates
	Oxford ICP Etcher(Chlorine)	Thomas Loughran
	Teaching Lab Acid Wet Bench	FabLab Staff
	Teaching Lab Caustic/Solvent Wet Bench	FabLab Staff
	Sample Preb Wet Bench	Mark Lecates
	Furnace Preclean Web Bench	FabLab Staff
	Critical Point Dryer	Jonathan Hummel
	Oxford Etcher (Fluorine)	Mark Lecates
	XactiX Xenon Difluoride Etcher	Jonathan Hummel
	Exploratory Lab Wet Bench	FabLab Staff

Lithography
	Name	Trainer
	Raith e_LiNE	Jonathan Hummel
	MJB-3 Mask aligner- right of spin station #1	John Abrahams
	EVG 620 Mask Aligner	John Abrahams
	Photoresist Spin Station- Left- FABLAB-PWM32-Programable	John Abrahams
	Photoresist Spin Station- Teaching Lab- 3	John Abrahams
	Developing Bench	FabLab Staff
	Polymer Spin Station	Thomas Loughran
	Raith off line computer	Jonathan Hummel
	Photoresist Spin Station- Right- FABLAB-PWM32-Programable	John Abrahams
	Spin Station- Laurell- SU-8 ONLY	John Abrahams
	MA-4 Suss Mask Aligner	John Abrahams
	MJB-3 Mask Aligner- Left of spin station #2	FabLab Staff
	FABLAB Photo oven (Blue M)	FabLab Staff
	Heidelberg MLA150 Maskless Aligner	Nam Kim

Metrology
	Name	Trainer
	Hitachi S-3400 Variable Pressure SEM	Jonathan Hummel
	Stress Measurement Tool	Thomas Loughran
	N&K Spectrophotometer	John Abrahams
	Microscope 1- Leitz Ergolux in Teaching Lab	FabLab Staff
	Profilometer Tencor Alpha Step 200- Teaching Lab	Mark Lecates
	Microscope 4- Leitz in FABLAB Photo Tunnel	FabLab Staff
	Microscope 2- Nikon Optophot in Teaching Lab	FabLab Staff
	Microscope 3- Zeiss in FABLAB Deposition Tunnel.	FabLab Staff
	Probe Station I- with 4155C	John Abrahams
	Hall Effect Measurement System	John Abrahams
	Solar Cell Simulator	John Abrahams
	Micromeritics ASAP 2020 Porosimeter Test Station	John Abrahams
	Micromeritics ASAP 2020 Porosimeter Degas #1	John Abrahams
	Micromeritics ASAP 2020 Porosimeter Degas #2	John Abrahams
	Arbin BT2000 Battery Test Station
	Profilometer P-1 Long Scan Profiler	Mark Lecates
	Woollam Spectroscopic Ellipsometer	John Abrahams
	SHIMADZU IR Prestige21 FTIR Spectrometer	John Abrahams

External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.