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<h2 id="page-heading">DEP-09: AJA ATC Orion 8 Sputtering system</h2>
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<span style="font-size:2em;color:#000;text-shadow: 2px 2px #efefef;">AJA ATC Orion 8 Sputtering system</span>
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<th>Description</th>
<td>
<img src="../../equipment/fablab/pictures/dep-09/dep-09_small.jpg" style="border:solid 1px #777;width:238px;margin-bottom:2px;float:right;">
Targets 1-Ti, 2-V2O5, 3-W, 4-Li2O, 5-Cu, 6-Cr, 7-Li3PO4, 8-Al Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them.
First 2 hours of the run: $75/hr for UMCP NanoCenter members, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)
This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au).
Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges)
Precious metals surcharge(10/11):
Au & Pd: $82 per 1000A
Pt: $70 per 1000A </td>
</tr>
<tr><th>Location</th>
<td><strong>FabLab</strong> |
<strong>FabLab Dep tunnel</strong>
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</tr>
<tr>
<th>Manufacturer</th>
<td>
AJA International ATC Orion 8<br>
</td>
</tr>
<tr>
<th>Staff Contact</th>
<td>
<a href="../staff/__querystring__u=164/index_no_slash.html"><img "hummel"="" alt="Jonathan" src="../../images/people/hummel.jonathan.jpg" style="float:right;margin-bottom:8px;border:solid 1px #444;max-width:180px;" title="Jonathan Hummel"></a><strong>Jonathan Hummel</strong><br><a href="mailto:jhummel1@umd.edu">jhummel1@umd.edu</a><br>301 405-5017<br> </td>
</tr>
<tr>
<th style="vertical-align: top;">Rates</th>
<td><div style="width:250px;float:left;margin:0">UMD</div><div style="width:50px;float:left;">$75/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">External Non-profit / University</div><div style="width:50px;float:left;">$116/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">Small Commercial / MTECH</div><div style="width:50px;float:left;">$158/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">Large Commercial</div><div style="width:50px;float:left;">$220/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">No Charge</div><div style="width:50px;float:left;">$0/hr</div><div style="clear:both;"></div> </td>
</tr>
<tr><th>Reservations</th>
<td> <table class="resource_log">
<tbody><tr><th>Date</th>
<th>Start</th>
<th>End</th>
<th>User</th>
</tr>
<tr bgcolor="#ffffff" title="continuation of reservation id #sc1649b0f07104b4">
<td nowrap="nowrap" valign="top">06/29/2023</td>
<td nowrap="nowrap" valign="top">01:00 PM</td>
<td nowrap="nowrap" valign="top">01:00 PM</td>
<td>Victoria Castagna Ferrari</td>
</tr>
<tr title="continuation of reservation id #sc1649b0f07104b4">
<td nowrap="nowrap" valign="top">06/30/2023</td>
<td nowrap="nowrap" valign="top">01:00 PM</td>
<td nowrap="nowrap" valign="top">02:00 PM</td>
<td>Victoria Castagna Ferrari</td>
</tr>
</tbody></table>
<br>Please login to make a reservation. </td>
</tr>
<tr><th>External Materials</th>
<td>
<p>
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper
safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit
an <a href="../../../docs.google.com/forms/d/e/1FAIpQLScswYS4nJmxcKNDT-Dex4wVqzxCX-Js0bjgcizhJL0lSUt21A/viewform__querystring__vc=0&c=0&w=1&flr=0&usp=mail_form_link/index_no_slash.html" target="_blank">External Materials Request form</a>
for each material you will bring.
</p>
</td>
</tr>
<tr><th>Logs</th>
<td> <div id="resource_log_table" style="margin:0;padding:0;">
<div class="log">
<table>
<tbody><tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Fri, Jun 30, 2023 </strong><br>
<strong>1:00 pm - 2:00 pm</strong><br>
<a href="mailto:ferrariv@umd.edu">Victoria Castagna Ferrari</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1649b11f204aeb&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
continuation of reservation id #sc1649b0f07104b4 </div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Thu, Jun 29, 2023 </strong><br>
<strong>1:00 pm - 1:00 pm</strong><br>
<a href="mailto:ferrariv@umd.edu">Victoria Castagna Ferrari</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1649b0f86ed686&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
continuation of reservation id #sc1649b0f07104b4 </div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Wed, Jun 28, 2023 </strong><br>
<strong>2:00 pm - 8:00 am</strong><br>
<a href="mailto:ferrariv@umd.edu">Victoria Castagna Ferrari</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1649b0f51a2143&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
V2O5/LiPON </div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Tue, Jun 27, 2023 </strong><br>
<strong>2:00 pm - 6:00 pm</strong><br>
<a href="mailto:ferrariv@umd.edu">Victoria Castagna Ferrari</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1649498dbb9794&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
LiPON </div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Mon, Jun 26, 2023 </strong><br>
<strong>10:00 am - 3:00 pm</strong><br>
<a href="mailto:ferrariv@umd.edu">Victoria Castagna Ferrari</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc16494989b7db8a&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
V2O5 at 300degC </div>
</td>
</tr>
</tbody></table>
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<tr><th>SOPs</th>
<td> <table class="sops">
<tbody><tr><td><a href="../../equipment/fablab/sops/dep-09/AJA%20ATC%20Orion%208%20sputtering%20tool%20SOP.pdf">AJA ATC Orion 8 sputtering tool SOP.pdf</a> (582.57 KB)</td></tr> </tbody></table>
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<tr><th>Manuals
<p style="font-size: .8em;font-weight:normal;">You must have reservation permissions to view the manuals. <a href="../../login.php">Please
login to view manuals</a>.</p>
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<tr><th>Recipes</th>
<td></td>
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