June 28, 2023 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.

For runs over 2 hours:
$10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-ZnO, 2-HfO2, 3-In2O3/ZnO
Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(10/11):
Au: $82 per 1000A
Pt: $70 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
06/29/2023 08:00 PM 09:00 AM Stefan Theodoru

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Thu, Jun 29, 2023
8:00 pm - 9:00 am
Stefan Theodoru
View Reservation
LiPON
Wed, Jun 28, 2023
2:00 pm - 3:30 pm
Po-Chun Huang
View Reservation
HfO2 ZnO and IZO
Tue, Jun 27, 2023
10:00 am - 10:00 am
Zoey Warecki
View Reservation
V and LiPON
Wed, Jun 21, 2023
2:30 pm - 2:45 pm
Andrew Evangelista
View Reservation
Silicon, Inconel.
Wed, Jun 21, 2023
10:00 am - 10:30 am
Liuxin Gu
View Reservation

Deleted by: Liuxin Gu

Pt(100nm)/Ag
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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