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<h2 id="page-heading">CVD-02: RTA-610</h2>
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<span style="font-size:2em;color:#000;text-shadow: 2px 2px #efefef;">RTA-610</span>
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<th>Description</th>
<td>
<img src="../../equipment/fablab/pictures/cvd-02/cvd-02_small.jpg" style="border:solid 1px #777;width:238px;margin-bottom:2px;float:right;">
The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.<br>
Key features include:<br>
<ul>
<li>Closed loop temperature control with thermocouple temp sensing</li>
<li>Precise time-temperature profiles tailored to specific processes</li>
<li>Rapid heating and cooling rates</li>
<li>Consistent sample-to-sample process cycle repeatability</li>
</ul>
AG Associates model 610 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 700 degrees Celsius or Pyrometer to 1000C.<br>
Always check with FABLAB staff before use.<br>
This system is for CLEAN Silicon only.<br>
Clean means no metals and no organics.<br> </td>
</tr>
<tr><th>Location</th>
<td><strong>FabLab</strong> |
<strong>CVD Tunnel</strong>
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<th>Manufacturer</th>
<td>
AG Associated 610<br>
</td>
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<tr>
<th>Staff Contact</th>
<td>
<a href="../staff/__querystring__u=356/index_no_slash.html"><img "abrahams"="" alt="John" src="../../images/people/abrahams.john.jpg" style="float:right;margin-bottom:8px;border:solid 1px #444;max-width:180px;" title="John Abrahams"></a><strong>John Abrahams</strong><br><a href="mailto:jabrah@umd.edu">jabrah@umd.edu</a><br>301-405-5018<br> </td>
</tr>
<tr>
<th style="vertical-align: top;">Rates</th>
<td><div style="width:250px;float:left;margin:0">UMD</div><div style="width:50px;float:left;">$75/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">External Non-profit / University</div><div style="width:50px;float:left;">$116/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">Small Commercial / MTECH</div><div style="width:50px;float:left;">$158/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">Large Commercial</div><div style="width:50px;float:left;">$220/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">No Charge</div><div style="width:50px;float:left;">$0/hr</div><div style="clear:both;"></div> </td>
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If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper
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for each material you will bring.
</p>
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<strong>Mon, Jun 26, 2023 </strong><br>
<strong>10:00 am - 10:30 am</strong><br>
<a href="mailto:drfontec@umd.edu">Daniela Fontecha</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc16498f06c91958&read_only=1" target="_blank">View Reservation</a> </div>
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<strong>Fri, Jun 16, 2023 </strong><br>
<strong>10:00 am - 10:30 am</strong><br>
<a href="mailto:drfontec@umd.edu">Daniela Fontecha</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1648b8ca63a4f2&read_only=1" target="_blank">View Reservation</a> </div>
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</div>
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<td style="width:40%;">
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<strong>Thu, Jun 15, 2023 </strong><br>
<strong>11:00 am - 11:15 am</strong><br>
<a href="mailto:mpatel25@umd.edu">Mital Patel</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1648b0aceea3be&read_only=1" target="_blank">View Reservation</a> </div>
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<td valign="top">
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Ni on Diamond at 800 C </div>
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<td style="width:40%;">
<div style="padding:5px;">
<strong>Mon, Jun 12, 2023 </strong><br>
<strong>9:00 am - 10:00 am</strong><br>
<a href="mailto:drfontec@umd.edu">Daniela Fontecha</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc164838f03b0173&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
Training with Nam </div>
</td>
</tr>
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<td style="width:40%;">
<div style="padding:5px;">
<strong>Wed, May 31, 2023 </strong><br>
<strong>12:00 pm - 12:30 pm</strong><br>
<a href="mailto:mpatel25@umd.edu">Mital Patel</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc16470bde7102bf&read_only=1" target="_blank">View Reservation</a> </div>
</td>
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<div style="padding:5px;">
Training with Nam 800C 1min </div>
</td>
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<tbody><tr><td><a href="../../equipment/fablab/sops/cvd-02/cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf">cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf</a> (510.35 KB)</td></tr><tr><td><a href="../../equipment/fablab/sops/cvd-02/index.php">index.php</a> (38 B)</td></tr> </tbody></table>
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