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<th>Description</th>
<td>
<img src="../../equipment/fablab/pictures/etch-03/etch-03_small.jpg" style="border:solid 1px #777;width:238px;margin-bottom:2px;float:right;">
Working with wet chemicals can be hazardous if you don't follow the proper procedures at all times. Violating procedure risks not only your health but also the health and safety of other users and may result in loss of access to FabLab for an extended period of time. </td>
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<tr><th>Location</th>
<td><strong>FabLab</strong> |
<strong>ETCH Tunnel</strong>
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<th>Manufacturer</th>
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<th>Staff Contact</th>
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<strong>FabLab Staff</strong><br><a href="mailto:fablab@umd.edu">fablab@umd.edu</a><br> </td>
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<th style="vertical-align: top;">Rates</th>
<td><div style="width:250px;float:left;margin:0">UMD</div><div style="width:50px;float:left;">$75/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">External Non-profit / University</div><div style="width:50px;float:left;">$116/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">Small Commercial / MTECH</div><div style="width:50px;float:left;">$158/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">Large Commercial</div><div style="width:50px;float:left;">$220/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">No Charge</div><div style="width:50px;float:left;">$0/hr</div><div style="clear:both;"></div> </td>
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<p>
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper
safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit
an <a href="../../../docs.google.com/forms/d/e/1FAIpQLScswYS4nJmxcKNDT-Dex4wVqzxCX-Js0bjgcizhJL0lSUt21A/viewform__querystring__vc=0&c=0&w=1&flr=0&usp=mail_form_link/index_no_slash.html" target="_blank">External Materials Request form</a>
for each material you will bring.
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<td style="width:40%;">
<div style="padding:5px;">
<strong>Fri, Jun 23, 2023 </strong><br>
<strong>2:00 pm - 2:15 pm</strong><br>
<a href="mailto:mrahaman@terpmail.umd.edu">Mohammad Habibur Rahaman</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc16495dd2c54175&read_only=1" target="_blank">View Reservation</a> </div>
</td>
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<div style="padding:5px;">
</div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Fri, Jun 23, 2023 </strong><br>
<strong>1:15 pm - 1:30 pm</strong><br>
<a href="mailto:mrahaman@terpmail.umd.edu">Mohammad Habibur Rahaman</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc16495cb1369c27&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
</div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Tue, Jun 20, 2023 </strong><br>
<strong>12:30 pm - 12:45 pm</strong><br>
<a href="mailto:mrahaman@terpmail.umd.edu">Mohammad Habibur Rahaman</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc16491d23f1e4b1&read_only=1" target="_blank">View Reservation</a> </div>
</td>
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<div style="padding:5px;">
</div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Wed, Jun 14, 2023 </strong><br>
<strong>2:45 pm - 3:00 pm</strong><br>
<a href="mailto:mrahaman@terpmail.umd.edu">Mohammad Habibur Rahaman</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1648a0865bc3f5&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
</div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Thu, Jun 01, 2023 </strong><br>
<strong>4:15 pm - 4:30 pm</strong><br>
<a href="mailto:eohyung@umd.edu">Yun Suk Eo</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1647906d36ce42&read_only=1" target="_blank">View Reservation</a> </div>
</td>
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<div style="padding:5px;">
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</td>
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<tr><th>SOPs</th>
<td> <table class="sops">
<tbody><tr><td><a href="../../equipment/fablab/sops/etch-03/etch-03_sop_etch_tunnel_base_bench.pdf">etch-03_sop_etch_tunnel_base_bench.pdf</a> (88.81 KB)</td></tr><tr><td><a href="../../equipment/fablab/sops/etch-03/index.php">index.php</a> (38 B)</td></tr> </tbody></table>
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<tr><th>Manuals
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login to view manuals</a>.</p>
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<td></td>
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<tr><th>Recipes</th>
<td><div><h3>Wet Etch Recipes</h3><a href="../../equipment/fablab/recipes/wet_etching/color_chart_for_SiO2_film_thickness.doc">color_chart_for_SiO2_film_thickness.doc</a> (86 KB)<br><a href="../../equipment/fablab/recipes/wet_etching/etch_rate_for_micromechanical_process_Williams+Gupta+Wasilik.pdf">etch_rate_for_micromechanical_process_Williams+Gupta+Wasilik.pdf</a> (1.02 MB)<br><a href="../../equipment/fablab/recipes/wet_etching/seminconductor_processing_recipes.doc">seminconductor_processing_recipes.doc</a> (37.5 KB)<br><a href="../../equipment/fablab/recipes/wet_etching/silicon_etching_and_cleaning.doc">silicon_etching_and_cleaning.doc</a> (176 KB)<br><a href="../../equipment/fablab/recipes/wet_etching/wet_etch_121500.pdf">wet_etch_121500.pdf</a> (13.43 KB)<br></div></td>
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