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<h2 id="page-heading">CVD-07: Oxford PECVD</h2>
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<span style="font-size:2em;color:#000;text-shadow: 2px 2px #efefef;">Oxford PECVD</span>
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<th>Description</th>
<td>
<img src="../../equipment/fablab/pictures/cvd-07/cvd-07_small.jpg" style="border:solid 1px #777;width:238px;margin-bottom:2px;float:right;">
This Oxford Plasmalab System 100 is a Plasma Enhanced Chemical Vapor Deposition (PECVD) system. It is used to deposit low-stress thin films with excellent step coverage on a variety of samples at low temperatures (generally 200 - 300 O C). These thin films include:
<ul><li>SiO2 (both TEOS and SiH4-based)</li>
<li>SiNx</li>
<li>SiON</li>
<li>Α - Si</li>
</ul> </td>
</tr>
<tr><th>Location</th>
<td><strong>FabLab</strong> |
<strong>CVD Tunnel</strong>
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<img src="../images/web/floorplan_cvd_tunnel_thumb.gif" style="">
</td>
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<tr>
<th>Manufacturer</th>
<td>
Oxford Instruments PlasmaLab System 100<br>
<a href="../../../www.oxford-instruments.com/products/etching-deposition-growth/tools/tools/system-100/Pages/system-100.aspx" target="_blank">Link</a>
</td>
</tr>
<tr>
<th>Staff Contact</th>
<td>
<a href="../staff/__querystring__u=107/index_no_slash.html"><img "loughran"="" alt="Thomas" src="../../images/people/loughran.thomas.jpg" style="float:right;margin-bottom:8px;border:solid 1px #444;max-width:180px;" title="Thomas Loughran"></a><strong>Thomas Loughran</strong><br><a href="mailto:tcl@umd.edu">tcl@umd.edu</a><br>301-405-3642<br> </td>
</tr>
<tr>
<th style="vertical-align: top;">Rates</th>
<td><div style="width:250px;float:left;margin:0">UMD</div><div style="width:50px;float:left;">$75/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">External Non-profit / University</div><div style="width:50px;float:left;">$116/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">Small Commercial / MTECH</div><div style="width:50px;float:left;">$158/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">Large Commercial</div><div style="width:50px;float:left;">$220/hr</div><div style="clear:both;"></div><div style="width:250px;float:left;margin:0">No Charge</div><div style="width:50px;float:left;">$0/hr</div><div style="clear:both;"></div> </td>
</tr>
<tr><th>Reservations</th>
<td> <table class="resource_log">
<tbody><tr><th>Date</th>
<th>Start</th>
<th>End</th>
<th>User</th>
</tr>
<tr bgcolor="#ffffff" title="With Nam">
<td nowrap="nowrap" valign="top">06/29/2023</td>
<td nowrap="nowrap" valign="top">01:00 PM</td>
<td nowrap="nowrap" valign="top">02:00 PM</td>
<td>Celine Oh</td>
</tr>
</tbody></table>
<br>Please login to make a reservation. </td>
</tr>
<tr><th>External Materials</th>
<td>
<p>
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper
safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit
an <a href="../../../docs.google.com/forms/d/e/1FAIpQLScswYS4nJmxcKNDT-Dex4wVqzxCX-Js0bjgcizhJL0lSUt21A/viewform__querystring__vc=0&c=0&w=1&flr=0&usp=mail_form_link/index_no_slash.html" target="_blank">External Materials Request form</a>
for each material you will bring.
</p>
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<table>
<tbody><tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Thu, Jun 29, 2023 </strong><br>
<strong>1:00 pm - 2:00 pm</strong><br>
<a href="mailto:coh26@terpmail.umd.edu">Celine Oh</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1649cadf6cf0f9&read_only=1" target="_blank">View Reservation</a> </div>
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<td valign="top">
<div style="padding:5px;">
With Nam </div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Wed, Jun 28, 2023 </strong><br>
<strong>11:15 am - 1:00 pm</strong><br>
<a href="mailto:chengdao@umd.edu">Chengdao Yu</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1649b0b0966372&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
</div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Tue, Jun 27, 2023 </strong><br>
<strong>3:15 pm - 5:00 pm</strong><br>
<a href="mailto:mheidari@umd.edu">Masoud Heidari Khouzani</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc1649af04aa793f&read_only=1" target="_blank">View Reservation</a> </div>
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<td valign="top">
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</div>
</td>
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<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Mon, Jun 26, 2023 </strong><br>
<strong>10:00 am - 10:45 am</strong><br>
<a href="mailto:hpcalex@umd.edu">Po-Chun Huang</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc16499971aca657&read_only=1" target="_blank">View Reservation</a> </div>
</td>
<td valign="top">
<div style="padding:5px;">
</div>
</td>
</tr>
<tr><td class="log_header Reservation"></td>
<td style="width:40%;">
<div style="padding:5px;">
<strong>Fri, Jun 23, 2023 </strong><br>
<strong>5:15 pm - 6:15 pm</strong><br>
<a href="mailto:xai@terpmail.umd.edu">xiheng ai</a><br>
<a href="../../scheduler/reserve.php__querystring__type=view&resid=sc16495e78a098ba&read_only=1" target="_blank">View Reservation</a> </div>
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</td>
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<tr><th>SOPs</th>
<td> <table class="sops">
<tbody><tr><td><a href="../../equipment/fablab/sops/cvd-07/Oxford%20PECVD%20SOP.pdf">Oxford PECVD SOP.pdf</a> (709.05 KB)</td></tr><tr><td><a href="../../equipment/fablab/sops/cvd-07/index.php">index.php</a> (38 B)</td></tr> </tbody></table>
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<tr><th>Manuals
<p style="font-size: .8em;font-weight:normal;">You must have reservation permissions to view the manuals. <a href="../../login.php">Please
login to view manuals</a>.</p>
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<td> <div class="file_list manuals">
<a href="../../equipment/fablab/manuals/cvd-07/ADP-ADS%20Series%202%20Dry%20Pump%20User%20Manual%20-%20mu_adp2-lm-p-h_05_gb_release07-08.pdf">ADP-ADS Series 2 Dry Pump User Manual - mu_adp2-lm-p-h_05_gb_release07-08.pdf</a> (5.03 MB)<br><a href="../../equipment/fablab/manuals/cvd-07/PECVD%20System%20Manual%20-%20Maryland%20University%2094-219896%20.pdf">PECVD System Manual - Maryland University 94-219896 .pdf</a> (13.51 MB)<br> </div>
</td>
</tr>
<tr><th>Recipes</th>
<td><div><h3>PECVD Recipes</h3><a href="../../equipment/fablab/recipes/pecvd/High%20Quality%20SiON%20PECVD.tif">High Quality SiON PECVD.tif</a> (96.05 KB)<br><a href="../../equipment/fablab/recipes/pecvd/High%20Qulaity%20SiO2%20PECVD.tif">High Qulaity SiO2 PECVD.tif</a> (78.22 KB)<br><a href="../../equipment/fablab/recipes/pecvd/SiNx%20PECVD.tif">SiNx PECVD.tif</a> (102.04 KB)<br><a href="../../equipment/fablab/recipes/pecvd/TEOS%20based%20SiO2%20PECVD.tif">TEOS based SiO2 PECVD.tif</a> (100.2 KB)<br><a href="../../equipment/fablab/recipes/pecvd/a-Si%20PECVD.tif">a-Si PECVD.tif</a> (74.76 KB)<br><a href="../../equipment/fablab/recipes/pecvd/a-Si_PECVD.txt">a-Si_PECVD.txt</a> (845 B)<br></div></td>
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