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File Name Date File Size
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Absorbance_measurement_of_polymers_at_ex.pdf 2022-09-17 16:20 465.7K
Advanced_0_3_NA_EUV_lithography_capabili.pdf 2022-09-17 16:20 1.1M
Advances_in_full_field_microscopy_with_t.pdf 2022-09-17 16:20 1.5M
Advances_in_reflection_grating_technolog.pdf 2022-09-17 16:20 1.3M
Alkyltin_Keggin_clusters_as_EUVL_photore.pdf 2022-09-17 16:20 628.6K
Chain_scission_resists_for_extreme_ultra.pdf 2022-09-17 16:20 259.4K
Challenge_toward_breakage_of_RLS_trade_o.pdf 2022-09-17 16:20 1.5M
Development_of_Nanodevices_Based_on_VO_T.pdf 2022-09-17 16:20 3.5M
Diazonaphthoquinone_molecular_glass_phot.pdf 2022-09-17 16:20 172.1K
EXPERIMENTAL_CHARACTERIZATIONS_OF_MICRO.pdf 2022-09-17 16:20 361.9K
Fabrication_of_high_aspect_ratio_100_nm.pdf 2022-09-17 16:20 923.1K
Fabrication_of_infrared_antennas_using_e.pdf 2022-09-17 16:20 4.3M
First_results_from_a_next_generation_off.pdf 2022-09-17 16:20 671.3K
Generation_and_characterization_of_spati.pdf 2022-09-17 16:20 2.9M
Grazing_Incidence_Mirrors_for_EUV_Lithog.pdf 2022-09-17 16:20 2.6M
Grazing_incidence_broad_ion_beams_for_re.pdf 2022-09-17 16:20 1.3M
Hybrid_materials_a_bottom_up_approach_fo.pdf 2022-09-17 16:20 1.9M
Initial_results_from_the_EUV_engineering.pdf 2022-09-17 16:20 381.1K
Lithographic_evaluation_of_the_EUV_engin.pdf 2022-09-17 16:20 3.9M
Lithography_Options_for_the_32_nm_Half_P.pdf 2022-09-17 16:20 3.0M
Mold_Fabrication_for_3D_Dual_Damascene_I.pdf 2022-09-17 16:20 755.0K
Nano_Patterned_Surfaces_for_Biomaterial.pdf 2022-09-17 16:20 607.1K
Nanofabrication_of_high_aspect_ratio_str.pdf 2022-09-17 16:20 446.2K
Nanoimprinting_of_Biomimetic_Nanostructu.pdf 2022-09-17 16:20 2.0M
Nanolithography_in_the_Evanescent_Near_F.pdf 2022-09-17 16:20 2.0M
Nanoresonators_with_Integrated_Circuitry.pdf 2022-09-17 16:20 3.8M
Next_generation_extreme_ultraviolet_lith.pdf 2022-09-17 16:20 2.5M
Performance_of_negative_tone_chemically.pdf 2022-09-17 16:20 1009.4K
Review_of_resist_based_flare_measurement.pdf 2022-09-17 16:20 1.4M
Semiconductor_Processing_Novel_Hybrid_Or.pdf 2022-09-17 16:20 800.1K
Spatial_modulation_of_nanopattern_dimens.pdf 2022-09-17 16:20 1.2M
Study_of_EUVL_mask_defect_repair_using_F.pdf 2022-09-17 16:20 4.7M
Ultra_clean_high_mobility_graphene_on_te.pdf 2022-09-17 16:20 1.4M
fabrication.doc 2022-09-17 16:20 287.5K
title_Cross_correlation_between_actinic.pdf 2022-09-17 16:20 415.0K
title_Design_and_performance_of_capping.pdf 2022-09-17 16:20 3.0M
title_EUV_generation_from_lithium_laser.pdf 2022-09-17 16:20 554.5K


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