Comments on: Who invented pellicles? https://lithoguru.com/life/?p=77 Musings of a Gentleman Scientist Tue, 12 Mar 2024 16:57:25 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: Dick Burton https://lithoguru.com/life/?p=77#comment-174139 Tue, 12 Mar 2024 16:57:25 +0000 #comment-174139 In reply to Anne Miller, Semiconductor Services.

Anne,
Been a long time.
Be well,
Dick Burton (Intel long ago)

]]> By: Ray Winn https://lithoguru.com/life/?p=77#comment-152350 Sun, 17 Apr 2016 17:53:50 +0000 #comment-152350 Ray Winn here. My company, Advanced Semiconductor Products, was the first to produce practicle pellicles that I patented. I won several legal battles, and eventually I licensed MLI, DuPont, Canon, FST (Korea) and five other companies and enjoyed an income flow of many millions of dollars until my patents expired. FST is still an ongoing company listed on the Korean stack exchange of which I am a founder and major stockholder.
Enough said!

]]> By: Anonymous https://lithoguru.com/life/?p=77#comment-3624 Mon, 30 Nov -0001 00:00:00 +0000 #comment-3624 I’ve also just found an IBM patent from 1977 that clearly describes pellicles: patent #4131363.

]]> By: Anne Miller, Semiconductor Services https://lithoguru.com/life/?p=77#comment-3626 Mon, 30 Nov -0001 00:00:00 +0000 #comment-3626 Pellicles were used in other optical applications, prior to their adoption by the semiconductor industry. As I recall, IBM and Intel were the first IC producers to evaluae pellicle usage. The primary supplier was Advanced Semiconductor Products (ASP) in Santa Cruz, CA (Robert Turnage and Ray Winn). Intel (Fab 1 on Whisman Rd, Mountain View) partnered with JASCO (Electronics Chemical iv.) in Mountain View to develop pellicles. The JASCO product line did not prevail. Anne Miller, the JASCO pellicle inventor, got funding from EKC Technology in Hawyard and founded MicroPel. Not much later, Chris Yen (then of Xerox in Palo Alto) founded Micro Lithography Inc. (MLI). Sometime later Dupont go into the fray.

]]> By: Homer https://lithoguru.com/life/?p=77#comment-3627 Mon, 30 Nov -0001 00:00:00 +0000 #comment-3627 A related question. How long after the pellicle was invented was the first one broken on a microscope? I broke one in 1983 trying to look at a mask on a microscope. The photo supervisor wasn’t too happy with me.

]]> By: Mark Mason https://lithoguru.com/life/?p=77#comment-3628 Mon, 30 Nov -0001 00:00:00 +0000 #comment-3628 I "popped" my first pellicle putting a cannon reticle into an nikon box — but that was in 1993.

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