Comments on: SPIE AL07 – Day 2 (Tuesday) https://lithoguru.com/life/?p=61 Musings of a Gentleman Scientist Mon, 30 Nov -001 00:00:00 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: Scott https://lithoguru.com/life/?p=61#comment-3274 Mon, 30 Nov -0001 00:00:00 +0000 #comment-3274 > scattering bars too close

I did something like that back at AMI in the 80s as a visual failure flag. I guess that the difference is that I did not publish on it.

]]> By: Wenzhan Zhou https://lithoguru.com/life/?p=61#comment-3276 Mon, 30 Nov -0001 00:00:00 +0000 #comment-3276 Totally agree, it is really a smart idea to tune the NILS by using SRAF. However, to my understanding, the true value of PMG mark is that it overcome the limitation of scatterometry at isolated pitch and make it possible to detect process induced profile change of isolated feature without sacrificing the precision.

]]>