Comments on: SPIE Advanced Lithography Symposium 2017 – day 2 https://lithoguru.com/life/?p=518 Musings of a Gentleman Scientist Wed, 01 Mar 2017 19:53:56 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: Vinh https://lithoguru.com/life/?p=518#comment-154415 Wed, 01 Mar 2017 19:53:56 +0000 http://life.lithoguru.com/?p=518#comment-154415 Hi Chris,

What do you think of metal oxide EUV photoresist? Based on shot noise, the number of photon on a 1nm2 is in the single digit. Will metal oxide EUV photoresist photon absorption factor be able to increase it to the level of 193i?

Thanks,
Vinh

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