Comments on: SPIE Advanced Lithography Symposium 2016 – day 4 https://lithoguru.com/life/?p=486 Musings of a Gentleman Scientist Sat, 05 Mar 2016 18:48:41 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: Miles https://lithoguru.com/life/?p=486#comment-151840 Sat, 05 Mar 2016 18:48:41 +0000 http://life.lithoguru.com/?p=486#comment-151840 In reply to Scott.

What is a good link for an introduction to the topic of stochastic-isity?

]]> By: Alexander https://lithoguru.com/life/?p=486#comment-151742 Mon, 29 Feb 2016 19:08:12 +0000 http://life.lithoguru.com/?p=486#comment-151742 Hari also spoke about Line Center Roughness (LCR), a property complementary to LWR, that is part of registration. LCR seems a natural addition to our language than “wiggliness” proposed by others, the term used to characterize gratings in astronomy apps. Finally, someone speaks about both CD and overlay…

LCR is an acronym to get used to and to start “dropping”.

]]> By: clovis https://lithoguru.com/life/?p=486#comment-151720 Sun, 28 Feb 2016 12:11:32 +0000 http://life.lithoguru.com/?p=486#comment-151720 Like every year I read this blog with a lot of interest. Thanks for this great summary, it help keeping up to date with the industry!

]]> By: Scott https://lithoguru.com/life/?p=486#comment-151711 Sun, 28 Feb 2016 08:28:01 +0000 http://life.lithoguru.com/?p=486#comment-151711 *Stochastic* what? Here it is being used as a noun, but the word is an adjective, a modifier of a noun. Stochastic variation? Stochastic system?

It is like usage of the word “particulate.” It should be “particulate matter,” for example.

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