Comments on: SPIE Advanced Lithography Symposium 2016 – day 3 https://lithoguru.com/life/?p=484 Musings of a Gentleman Scientist Tue, 01 Mar 2016 17:12:09 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: anonymous https://lithoguru.com/life/?p=484#comment-151770 Tue, 01 Mar 2016 17:12:09 +0000 http://life.lithoguru.com/?p=484#comment-151770 Chris- excellent write-up. over the years, you have been a great contributor to all things advanced lithography and I have to say I appreciate it. I have not always liked your approach, but have always respected your position.

Regarding your comments regarding the presence of women at every level of SPIE; SPIE is and has continued to be an “old boys club’ .
There is an obvious deficiency in cultural and ethnic diversity too which can be seen at the various companies and at the conferences. Unfortunate but true.
Kudos to you for pointing it out; not sure how much difference it will make.

]]> By: Lloyd https://lithoguru.com/life/?p=484#comment-151733 Sun, 28 Feb 2016 21:15:41 +0000 http://life.lithoguru.com/?p=484#comment-151733 Chris – Thanks for the great summary of SPIE. I appreciate your efforts each year – especially the years that I can not attend.

]]> By: anonymous https://lithoguru.com/life/?p=484#comment-151673 Fri, 26 Feb 2016 23:32:36 +0000 http://life.lithoguru.com/?p=484#comment-151673 What do you think about mask damage after 40,000 wafer exposure?
They also showed wafer defects show Ru particle.
Only source of Ru is capping layer of ML mirror.
Combine two factor possibly means mirror have damage.

Next why anyone have pellicle life test only for 200 wafers?
Any reason not 1000s? This means they expected life of EUV pellicle they made should be a little above 200wafers.
Typical life of DUV pellicle is more than million wafers.
If I need to replace pellicle for every 10000 wafer, I would not consider it.

EUV power is now approaching to target at Cymer. Still it is several times lower than target in the field. This does not means EUV is ready but they will find more problems.
Now we just opened onion net and started to feel dried skin of onion.

]]> By: Tom https://lithoguru.com/life/?p=484#comment-151656 Thu, 25 Feb 2016 17:29:26 +0000 http://life.lithoguru.com/?p=484#comment-151656 Thank you for this great blog and excellent summary of SPIE 2016!

Did you see anything outstanding at the exhibition – if you had the time to visit ?

Any thoughts about Solar-Semi Gmbh – exhibited at Booth #327 ( http://www.solar-semi.com/ ) and their merger with swedish Obducat ?

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