Comments on: SPIE Advanced Lithography Symposium 2016 – day 2 https://lithoguru.com/life/?p=482 Musings of a Gentleman Scientist Sun, 13 Mar 2016 14:01:50 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: Ofer Adan https://lithoguru.com/life/?p=482#comment-151935 Sun, 13 Mar 2016 14:01:50 +0000 http://life.lithoguru.com/?p=482#comment-151935 You are welcome – thank you for attending, and making the event a success by the fun criteria.

Your comments were well received, especially with regards to the treatment of data. I do hope to hear more

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By: AVP https://lithoguru.com/life/?p=482#comment-151698 Sat, 27 Feb 2016 17:43:03 +0000 http://life.lithoguru.com/?p=482#comment-151698 In reply to Fuzzy.

Well, despite the fact I would love to have more information about everything, this is not entirely true. For example, we know much more about the metal containing or nanoparticle materials than the regular organic CARs. This makes sense because these systems are simpler (in terms of composition) and still in an academic phase. You can find quite a lot of information published scattered among conferences in the last 3-4 years (Prof. Ober and Dr. Alex Robinson publications being the firsts).
With all due respect to science, sharing composition information at this point does not seem a very smart idea for these guys. I bet they have to feed their families, too…
Let me flip the coin for a second and ask you: what do we know about the light hitting the wafer on EUV systems? Any idea about the spectral distribution? Seems like an important thing to know…in optical lithography

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By: Fuzzy https://lithoguru.com/life/?p=482#comment-151661 Fri, 26 Feb 2016 04:18:41 +0000 http://life.lithoguru.com/?p=482#comment-151661 It was disappointing to see resist vendors not 100% transparent with metal compositions (which may adversely interact with existing processes). What are your thoughts on balancing IP with transparency?

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