I’d love to see a section with more details on how these full-chip lithography simulators trade-off accuracy vs. speed as well as an introduction to the whole OPC/RET flow.

Just ran into your blog; very cool.

Since the processing and chemistry is tied very closely to the physics of lithography (you can’t talk about one without at least alluding to the others), it would be nice to see guidelines on how to develop a lithography process. What to look at first, what to watch for, the proper interpretation of metrology, etc.