Comments on: 100W by the End of the Year https://lithoguru.com/life/?p=409 Musings of a Gentleman Scientist Wed, 13 Jul 2016 15:33:29 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: Semicon Again | Lithoguru https://lithoguru.com/life/?p=409#comment-153153 Wed, 13 Jul 2016 15:33:29 +0000 http://life.lithoguru.com/?p=409#comment-153153 […] when we have “100W by the end of the year”, a prediction first made by Cymer and ASML for 2007 (http://life.lithoguru.com/?p=409).  Chris Lyons of JSR focused on resists for EUV, where he claimed that resolution is not a […]

]]> By: Paul https://lithoguru.com/life/?p=409#comment-136092 Tue, 24 Feb 2015 12:53:02 +0000 http://life.lithoguru.com/?p=409#comment-136092 In reply to Moshe Preil.

Moshe, people just like you !

Chris Mack is just presenting a healthy level of “wanting to see the data”. Currently “80W” is achieved in the field and I expect some/most/all of the NXE3300 users to confirm this at SPIE. This is significant progress over the last year. It did require some serious upgrades. 100W is actually low compared to the next planned step to 125W as the next milestone…

]]> By: Moshe Preil https://lithoguru.com/life/?p=409#comment-135844 Fri, 20 Feb 2015 23:55:08 +0000 http://life.lithoguru.com/?p=409#comment-135844 There must have been a button on the web site labeled “Send a copy to Moshe” because 5 people have already sent me copies of the presentation. Very nicely done through 2013. It will be interesting to see what additions get made next week.

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