Comments on: Grant Willson’s Japan Prize – on video https://lithoguru.com/life/?p=278 Musings of a Gentleman Scientist Wed, 14 May 2014 17:30:19 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: David https://lithoguru.com/life/?p=278#comment-14392 Mon, 30 Nov -0001 00:00:00 +0000 http://www.lithoguru.com/wordpress/?p=278#comment-14392 Thanks for the link – great talks! – what’s interesting about ’em is that when things looked impossible for DUV Lithography they came up with a solution (helped by the development of Excimer lasers). They were too late, but fortunately I-line filled the gap.

Now we are in a similar position with EUV and there are glimpses of new (non-chemically-amplified?) resists and more powerful sources – it will be interesting to look back in 25 years when we know what happened (I hope I am still around).

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