Comments on: SPIE Advanced Lithography 2013 – day 4 https://lithoguru.com/life/?p=271 Musings of a Gentleman Scientist Wed, 14 May 2014 17:30:19 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: David https://lithoguru.com/life/?p=271#comment-14338 Mon, 30 Nov -0001 00:00:00 +0000 http://www.lithoguru.com/wordpress/?p=271#comment-14338 Global temperature plots that roughly follow the Mack rule can be found at:

http://wattsupwiththat.com/…

They indicate no cause for Mann/Gore hockey-stick panic.

I doubt that anyone is going to buy a $gazillion Litho tool on the basis of a SPIE presentation. In any case, 0.2% uniformity is pretty impressive, whatever the scale.

As for NA >0.45 EUV, Zeiss also mentioned their preference for 8x – it’s Deja Vu all over again.

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