Comments on: SPIE Advanced Lithography 2013 – day 0 https://lithoguru.com/life/?p=267 Musings of a Gentleman Scientist Mon, 30 Nov -001 00:00:00 +0000 hourly 1 https://wordpress.org/?v=6.4.5 By: Arvind https://lithoguru.com/life/?p=267#comment-14330 Mon, 30 Nov -0001 00:00:00 +0000 #comment-14330 I took your course at SPIE in 2008 and enjoyed reading your well written book. I am attending spie this year and concur with your assessment on dsa. I don’t have much of a background on it but from just staring at the sem images it seems to be a good fit to try on the via layers. I would be interested in hearing your thoughts on it.

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