Comments on: The Resolution Limit of Hard Drive Manufacturing

By: Recursive Loop

Recursive Loop — Mon, 30 Nov -0001 00:00:00 +0000

Just curious, at what pitch can dense lines be considered isolated lines. Or alternatively, what’s the maximum lines/spaces ratio for dense lines? (My guess is, when the diffraction of a projected line practically stops influencing it’s neighbor)

By: martijn

martijn — Mon, 30 Nov -0001 00:00:00 +0000

As far as I know, WD and Seagate use KrF (248 nm) litho tools, not 193. This makes it a lot cheaper (~35%) and perhaps only slightly (~20%?) more difficult

By: Dave White

Dave White — Mon, 30 Nov -0001 00:00:00 +0000

They have KrF and ArF. The minimum pitch for isolated line to be considered depends on a few things:
Resist thickness
length of line(s)

The minimum I have worked with to be considered semi-isolated is a pitch of 1:3