TOOLweb RGA V1.0 Installation
Summary
A TOOLweb RGA installation will install all required programs and files to run the application as well as lead you through the configuration steps.
This install assumes a RGA PC that has not previously been used to run RGA software. If you are upgrading do not use this CD without running the Upgrade program – please see the document titled “TOOLweb RGA V1.0 Upgrade”
Installation Preparation
Pre Installation Requirements
1. The TOOLweb RGA V1.0 installation CD.
2. The RGA PC Administrator password.
3. The Windows 2000/XP CD used to install Windows on the RGA PC or the Windows files on the RGA PC hard disk.
4. For installations that share the Tools SECS port using a Blue Box: A user name and password for the Blue Box. If you do not know the IP address of the Blue Box you will also need the root password, a keyboard and monitor and instructions on how to setup a temporary IP address for the Blue Box.
Pre Installation Actions
1. Create (or install) a D: hard disk drive to keep the RGA data off the Windows drive. This is optional, but recommended. If you do not have a D: drive substitute “C:” (or a different drive letter if you have a hard disk drive in another place) for “D:” in the instructions below.
2. Set both the correct time zone and then date and time for the PC.
Main Installation
Log on to the RGA PC as the Administrator.
Install Internet Information Services (IIS)
Install Internet Information Services (IIS) by running “Add or Remove Programs” from the Control Panel.
Click the “Add/Remove Windows Components”, scroll down and check the “Internet Information Services (IIS)” checkbox and click the “Next” button
When the component wizard has completed click the “Finish” button
TOOLweb RGA
Insert the TOOLweb RGA V1.0 CD-ROM disk. This will load the MKS RGA Software Administrative Assistant that will guide you through the install process.
If the PC is not configured to auto run a CD-ROM then you must manually run the “adminSetup.exe” program in the “Software” folder on the TOOLweb RGA CD-ROM.
Click “Next” to continue.
If the “Administrative Assistant Help” window is displayed hide it by clicking the “Close” button.
Leave the “Quick Setup Code” as twrga300 and click “Next”
Do not change the “Install Location” or “shared data” values
Confirm creating the “D:\Process Eye” folder by clicking “Yes”
Confirm the “security details” dialog by clicking “OK
Select “Complete Install” and click “Next”
The TOOLweb RGA CD will offer to upgrade your operating system files – it is recommended that you accept the upgrade but it is not required. Click “Next”
Please note that any upgrades are not described in the pages below. After all upgrades are complete, with any required reboots, you will be at the next (Install .NET framework) step.
It is essential that if you do install upgrades to Windows that require a reboot you log back on as the Administrator to continue the installation
The next step will install the .NET framework if it is not already present. Click “Next” to start.
Select “I agree” and click “Install” – when complete click “OK”
The installer will then check the framework was correctly installed and commence the Process Eye part of the install. Click the “Next” button to continue.
The next phase is to install the database server. Select “Install a new Process Eye instance” and click “Next”.
The installer now has a list of tasks to perform and will step through them one at a time. Click the “Next” button to continue.
After the first task (install Microsoft SQL Server) a reboot of the RGA PC is required. This will be performed automatically. It is essential that after the reboot you log back on as the Administrator to complete the installation.
The MKS RGA Software Setup program should automatically restart a few seconds after you log on as the administrator. If, after waiting a few minutes, it has not restarted you can manually restart it by browsing to the “Software” folder on the installation CD and running the “adminsetup.exe” program.
The remaining tasks will be displayed. Click “Next” to continue.
After Process Eye has been installed and the appropriate configuration settings applied the TOOLweb RGA web applications will be installed. Click “Next” to start the wizard.
You should leave the “Virtual directory” and “Port” at their default values and click “Next”
Click “Next” to confirm installation
Click “Close” to complete the web applications wizard
Administrative Options
The Process Eye system must now be configured. This is a two part task. The majority will be performed now as an Administrator. Later, after logging on as the RGAUser final configurations will be carried out. Click the “Next” button to start the “Administrative Options” configuration.
First select the “Settings and data are stored in a location that is accessible to all users” then define where data and settings are to be stored. If possible this should avoid being on the same disk as Windows (for example use D:\Process Eye as shown.) Then select the pressure units and click “Next”
Select “Store recipes locally on this computer” and click “Next”
Uncheck all the “Security Features” and click “Next”
Details of the SECS communications setup will be tool specific but you will typically need to select HSMS, enter the IP address and Port of the Tool. Click “Advanced”
Select “Custom settings”, enter the tools Device ID. For Endura 300 tools select “Connect using S1F13” and uncheck “2-byte SVID Polling”
Uncheck any ports that will not have RGA’s connected. If in doubt leave all ports checked. Click “Next”
If e-mail Alarm actions are required select “Enable e-mail” and enter a name or IP address and click “Next” – for more information on e-mail please see the “E-mail Configuration” section of the TOOLweb RGA Real-time manual or online help.
The next dialog deals with the Windows firewall. If you have Windows 2000 as the operating system the screen below will not be displayed. If you have Windows XP with no Service Pack or Service Pack 1 you will be requested to configure the system but informed that until Service Pack 2 is installed no action will be taken. If you have Service Pack 2 you should typically leave the settings at their default value and click “Next”
Click “Next” to save these settings
Once the settings have been saved the TOOLweb RGA initialization and database configuration application will be run. Click “Next” to start it.
Click “Next” to copy files then “Next” again to load the Tool/Chamber Install/Configure application
Select the “Tool Type” from the dropdown list. Type in the name the tool is called in the fab and enter a comment if required. Check any chambers with an RGA fitted to them. If the Transfer Chamber (Chamber Xfr) has an RGA you must also check the connected chambers (not shown) that will appear when “Chamber Xfr” is checked. Click “Done”
Click “Finish” to end the TOOLweb RGA 300 Install program
Click “Finish” to end the MKS RGA Software Setup program
Create an account on the RGA PC with a user name of RGAUser and a password of “ok” (without the quotes.)
Configure the RGA PC to auto log
on to the RGAUser account. Either use the operating
system tools or double click on the “X:\Extra\Autologon RGAUser.reg”
file (where X is the
Reboot – the RGA PC should automatically log on to the RGAUser account. Note TWRGA will not run until the steps described below are completed.
User Setup
After the reboot into the RGAUser account run the “User Setup” (Start | MKS RGA Applications | Tools | User Setup)
Click the “Next” button to run the Setup Wizard
To install the TOOLweb RGA recipes click the “Have Disk …” button, click on the dropdown and select the CD drive holding the TOOLweb RGA install CD (called TWRGA) and click “OK”
Ensure that the “TOOLweb RGA” recipe family name is checked and click “Next”
Make sure that all RGA’s are connected and powered on. Select “Run hardware auto-detection now …” and click “Next”
The RGA Device Manager will show all connected RGA’s. The red cross in the icon means it must be configured. To configure double click an RGA with a red cross. The configuration steps are different for an Open Ion Source and a Closed Ion Source RGA
Open Ion Source
Click the “Configure Now” Button
Enter the chamber name exactly as spelt and capitaled in the earlier “TWRGA Install Configure” step and click “Install.”
It will take a few seconds for the configured RGA to be displayed – during this time it will not be shown on the RGA Device Manager window – wait for it to be displayed with a green check as its icon
Closed Ion Source
Click the “Configure Now” Button
You will be informed that the inlets must be configured. Click the “OK” button
First select the appropriate pressure units for the location and click “OK”
Then enter the chamber name in the “Friendly Name” box exactly as spelt and capitalized in the earlier “TWRGA Install Configure” step. Click on the “Inlets” tab
Select “Non-Standard Fixed” for “Additional Inlet #1” and “Additional Inlet #2”, enter the “Pressure reduction” values on the tag supplied with the inlet or, if it cannot be found, enter “5.0” for Inlet #1 and 5000.0 for Inlet #2 and click “OK”.
After a few seconds the configured RGA will be displayed. When all RGAs have a green check click “Close”
Select “I would like exclusive access to all serial instruments …” and click “OK
Click “Finish” to start loading the TOOLweb RGA recipes
When the recipes have been loaded the details will be displayed in the “Recipe Installation History”, click “Close”
Lastly click “OK” to finish the Setup Wizard.
Either log off or reboot the machine – either will log back on as the RGAUser and start the “TOOLweb RGA 300 Loader” program. This, after giving a 5 second opportunity to abort the load, will load TOOLweb DLL files and start Process Eye using the Watchdog application.
After the RGA(s) have initialized and a few wafers have been run browse to http://localhost/RGA300 and confirm you can see the summary data in a report (note that the wafers will be at the very right of the report)
Finally you should configure the following to give the RGA display as much space as possible and make using TOOLweb RGA a little easier:
Process Eye
- Maximize the Process Eye Window
- Select View | Toolbars… and uncheck the “Interactive Scan” toolbar
- Uncheck View | Status Bar
- Uncheck View | Recipe List Window
Reports
- Go to TW Menu | Preferences and set the “Chart” settings to fill the screen
Internet Explorer
- Browse to http://localhost/RGA300 and when the page is displayed set it to be the default home page (Tools | Internet Options… | General | Use Current)
Real-time Configuration
- Browse to http://localhost/Realtimeconfiguration and set the “clientarea” for each Chamber as required
Windows
- Set the taskbar to automatically hide itself by right mouse clicking the task bar, selecting “Properties” and checking the “Auto-hide the taskbar” checkbox