General Purpose Downstream Pressure Controller with Mass Flow Meter

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Overview

The GPCMA is a metal-sealed pressure controller with an integral mass flow meter. It is suited for a wide variety of applications requiring pressure control capability from 500 Torr to 100 psi. The GPCMA incorporates the latest in digital flow control electronics along with a well proven, thermally stable pressure sensor and mechanical design. The mass flow meter provides the capability of monitoring mass flow rates as a diagnostic for critical process applications.

Percent of set point accuracy enables precise process control
Temperature compensated pressure sensor maintains tight accuracy
DeviceNet™, EtherCAT®, or RS485 communications
10µ inch electropolished 316L surface finish and metal seals for high purity applications
Embedded user interface
Patented mass flow sensor provides exceptional long-term accuracy and zero stability

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Products

Configuration Options

The following options are available for GPCMA General Purpose Pressure Controllers with Mass Flow Meter
Ordering Code Example: GPCMA13T07103R83T110

Configuration Option	Option Code
GPCMA Pressure Controller with MFM	GPCMA
Pressure Range Full Scale
500 Torr	52T
1000 Torr	13T
2000 Torr	23T
60 psia	61P
100 psia	12P
1000 mBar	13M
2000 mBar	23M
5000 mBar	53M
100 kPa	12K
200 kPa	22K
600 kPa	62K
Gas
Helium (001)	01
Argon (004)	04
Hydrogen (007)	07
Nitrogen (013)	13
Full Scale Flow Rate
5 sccm	500
10 sccm	101
20 sccm	201
50 sccm	501
100 sccm	102
200 sccm	202
500 sccm	502
1000 sccm	103
2000 sccm	203
5000 sccm	503
10000 sccm	104
20000 sccm	204
30000 sccm	304
50000 sccm	504
Fittings
Swagelok 4 VCR	R
¼ in. Swagelok	S
C-Seal	C
W-seal (1.125 in.)	H
Communications
DeviceNet	6
EtherCAT	8
RS485 (ASCII)	5
Orifice Size
A (50 sccm)	A
#1 (200 sccm)	1
#2 (1000 sccm)	2
#3 (5000 sccm)	3
#4 (10,000 sccm)	4
#5 (20,000 sccm)	5
#6 (30,000 sccm)	6
#7 (50,000 sccm)	7
Plug Material
Teflon	T
Valve Type
Normally Closed	1
Firmware
Customer must specify firmware version at time of order	10

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	Description
	GPCMA Absolute Pressure Controller, General Purpose, Mass Flow Controller, Metal-sealed

Specifications

Type

GPCMA Absolute Pressure Controller with Mass Flow Meter
Pressure Range

500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale
Fitting Type

Swagelok® 4 VCR Male
1-1/8 inch surface mount (C-seal, W-seal)
1/4 inch Swagelok compression seal
Valve Position

Normally Closed
Valve Seat

PTFE (Teflon®)
Flow Rate

5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000, 50000 (N2 equivalent)
Pressure Readout Units

Torr, kPa, psi, mbar
Pressure Resolution

0.1 Torr
Pressure Control Accuracy

±1.0% of Reading >20% Full Scale
±0.2% of Full Scale <20% of Full Scale Flow (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Transducer Over Pressure Limit

2x Full Scale for all ranges
Maximum Differential Pressure

45 psid
Burst Pressure

1500 psig
Control Mode

Downstream
Pressure Measurement Accuracy

±0.5% of Reading
Zero Temperature Coefficient

±0.02% of Full Scale/°C
Span Temperature Coefficient

±0.04% of Reading/°C
Control Range

>2 to 100% of Full Scale
Typical Response Time

<1.0 second
Operating Temperature

10-50°C (50-to 122°F)
Storage Temperature

-20-80°C (-4-176°F)
Storage Humidity

0 to 95% Relative Humidity, non-condensing

External Leak Integrity

<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
Flow Measurement Range

2% to 100% of Full Scale
Flow Repeatability

±0.3% of Reading
Flow Resolution

0.1% of Full Scale
Flow Accuracy

±1.0% of Reading >20% of Full Scale
±0.2% of Full Scale (>20% of Full Scale flow)
(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Flow Span Temperature Coefficient

<0.08% of Reading/°C
Flow Zero Temperature Coefficient

<0.05% of Full Scale/°C
Wetted Materials

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45
Optional: PTFE (Teflon) Valve Seat
Surface Finish

<10 µinches, average Ra electropolished
Power Required

DeviceNet™: +11 to +25 VDC per (<4 watts)
EtherCAT®: +24 VDC (<5 watts)
RS485: +15 to +24 VDC(<4 watts)
Connector-Interface

DeviceNet™: 5 pin micro connector (power and comm.)
EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
RS485: 9 pin Type D male (power and comm.)
Data Rate Switch

DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)
EtherCAT®: No switch
RS485: No switch (set data rate via RS485)
EtherCAT Communication Rate

100 Mbps
DeviceNet Communication Rate

125 Kbps, 250 Kbps, 500 Kbps
RS485CommunicationRate

9.6 Kbps,19.2 Kbps,38.4 Kbps
MAC ID Switches

DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
EtherCAT®: 3 switches, 16 positions
RS485: Set address over RS485, Station Addresses 0,0 to 9,9
Network Size

DeviceNet™: Up to 64 nodes
EtherCAT®: Up to 4095 nodes
RS485: Up to 32 nodes
Indicators

DeviceNet™: LED Network (green/red), LED Module (green/red)
EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
RS485: LED Comm (yellow),LED Error (red)
Weight

<3 lbs (1.36 kg)
Compliance

CE

Specifications

Type

GPCMA Absolute Pressure Controller with Mass Flow Meter
Pressure Range

500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale
Fitting Type

Swagelok® 4 VCR Male
1-1/8 inch surface mount (C-seal, W-seal)
1/4 inch Swagelok compression seal
Valve Position

Normally Closed
Valve Seat

PTFE (Teflon®)
Flow Rate

5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000, 50000 (N2 equivalent)
Pressure Readout Units

Torr, kPa, psi, mbar
Pressure Resolution

0.1 Torr
Pressure Control Accuracy

±1.0% of Reading >20% Full Scale
±0.2% of Full Scale <20% of Full Scale Flow (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Transducer Over Pressure Limit

2x Full Scale for all ranges
Maximum Differential Pressure

45 psid
Burst Pressure

1500 psig
Control Mode

Downstream
Pressure Measurement Accuracy

±0.5% of Reading
Zero Temperature Coefficient

±0.02% of Full Scale/°C
Span Temperature Coefficient

±0.04% of Reading/°C
Control Range

>2 to 100% of Full Scale
Typical Response Time

<1.0 second
Operating Temperature

10-50°C (50-to 122°F)
Storage Temperature

-20-80°C (-4-176°F)
Storage Humidity

0 to 95% Relative Humidity, non-condensing

External Leak Integrity

<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
Flow Measurement Range

2% to 100% of Full Scale
Flow Repeatability

±0.3% of Reading
Flow Resolution

0.1% of Full Scale
Flow Accuracy

±1.0% of Reading >20% of Full Scale
±0.2% of Full Scale (>20% of Full Scale flow)
(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Flow Span Temperature Coefficient

<0.08% of Reading/°C
Flow Zero Temperature Coefficient

<0.05% of Full Scale/°C
Wetted Materials

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45
Optional: PTFE (Teflon) Valve Seat
Surface Finish

<10 µinches, average Ra electropolished
Power Required

DeviceNet™: +11 to +25 VDC per (<4 watts)
EtherCAT®: +24 VDC (<5 watts)
RS485: +15 to +24 VDC(<4 watts)
Connector-Interface

DeviceNet™: 5 pin micro connector (power and comm.)
EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
RS485: 9 pin Type D male (power and comm.)
Data Rate Switch

DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)
EtherCAT®: No switch
RS485: No switch (set data rate via RS485)
EtherCAT Communication Rate

100 Mbps
DeviceNet Communication Rate

125 Kbps, 250 Kbps, 500 Kbps
RS485CommunicationRate

9.6 Kbps,19.2 Kbps,38.4 Kbps
MAC ID Switches

DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
EtherCAT®: 3 switches, 16 positions
RS485: Set address over RS485, Station Addresses 0,0 to 9,9
Network Size

DeviceNet™: Up to 64 nodes
EtherCAT®: Up to 4095 nodes
RS485: Up to 32 nodes
Indicators

DeviceNet™: LED Network (green/red), LED Module (green/red)
EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
RS485: LED Comm (yellow),LED Error (red)
Weight

<3 lbs (1.36 kg)
Compliance

CE

Features

Digital I/O

The GPCMA digitally controlled pressure controller is available with digital I/O (EtherCAT®, DeviceNet™ or RS485). The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are less than 1 second dependent on installation conditions. Included is a digital calibration that yields 1% of set point accuracy.

High Purity Applications

The GPCMA, with 4 VCR® fittings, is 1.125'' (28.6 mm) wide and 4.88'' (124 mm overall) length allowing it to fit in standard gas systems. It is also available with the 1.125'' (38.6 mm) IGS compatible c-seal and w-seal configurations. The GPCMA metal-sealed, pressure controller with its 10 microinch, electropolished surface finish is well suited for use in high purity process applications. The GPCMA is available with a normally closed valve.