Multi-gas, Multi-range, Metal-sealed, 5-50,000 sccm Mass Flow Controller
Overview
The GM50A & GM51A digitally-controlled mass flow controllers are available with either analog or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow rates from 5 to 50,000 sccm
- Metal sealed with Teflon valve plug
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- Less than 750 millisecond settling time
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
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GM50A013101RMM020 |
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GM50A013101SMM020 |
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GM50A013102RMM020 |
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GM50A013103RMM020 |
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GM50A013103SMM020 |
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GM50A013201RMM020 |
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GM50A013202RMM020 |
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GM50A013203RMM020 |
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GM50A013204RMM020 |
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GM50A013204SMM020 |
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GM50A013501RMM020 |
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GM50A013502RMM020 |
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GM50A013503RMM020 |
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Configuration Options
The following options are available for GM50A Mass Flow Controllers
Ordering Code Example: GM50A013502R6V020
|
Configuration Option |
Option Code |
|---|---|
| GM50A Mass Flow Controller | GM50A |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| 6 mm Swagelok | M |
| 8 mm Swagelok | E |
| 10 mm Swagelok | P |
| 12 mm Swagelok | F |
| 1/8 in. Swagelok (1000 sccm or below) | A |
| 1/4 in. Swagelok | S |
| 1/2 in. Swagelok | K |
| 3/8 in. Swagelok | J |
| 2 VCR Male (1000 sccm or below) | B |
| 4 VCR Male | R |
| 8 VCR Male | T |
| C-seal surface mount | C |
| W-seal surface mount | H |
| NW16 ISO-KF | U |
Connector |
|
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (9 pin D connector) | A |
| Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
| Analog 4 to 20 mA (15 pin D connector) | H |
Valve/Device Type |
|
| Normally Closed/Mass Flow Controller, Teflon® | M0 |
| No Valve/Mass Flow Meter | 30 |
| Normally Open/Mass Flow Controller, Teflon® | PT |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
The following options are available for GM51A Mass Flow Controllers
Ordering Code Example: GM51A013502R6V020
|
Configuration Option |
Option Code |
|---|---|
| GM51A Mass Flow Controller | GM51A |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| 4 VCR Male | R |
| C-seal surface mount as per SEMI 2787.1 | C |
| W-seal surface mount as per SEMI 2787.3F | H |
Connector |
|
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (9 pin D connector) | A |
| Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
| Analog 4 to 20 mA (15 pin D connector) | H |
Valve/Device Type |
|
| Normally Closed/Mass Flow Controller, Teflon® | M0 |
| No Valve/Mass Flow Meter | 30 |
Reserved for Future Use |
|
| Std. | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
Specifications
-
TypeMass Flow Controller (MFC)
-
Full Scale Flow Range5 - 50000 sccm (N2 equivalent)
-
Control Range2-100% of Full Scale
-
Maximum Inlet Pressure150 psig
-
Normal Operating Pressure Differential10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
-
Repeatability± 0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading/°C
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Inlet Pressure Coefficient<0.02% of Reading/psi
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Typical Settling Time<750 msec, typical above 5% Full Scale
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Warm-up Time30 minutes
-
Operating Temperature10°C to 50°C
-
Storage Humidity0 to 95% Relative Humidity, non-condensing
-
Storage Temperature-20° to 80°C
-
External Leak Integrity<1 x 10-10 (scc/sec He)
-
Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere
-
Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
-
Weight3 lbs (1.4 kg)
-
ComplianceCE
Features
Communication Options/Specifications
| Digital I/O | DeviceNet™ | RS485 | Profibus® | EtherCAT® | PROFINET® |
|---|---|---|---|---|---|
| Input Power Required | +11 to +25 VDC per (<2 watts) | +15 to +24 VDC (<2 watts) | +15 to +24 VDC (<2 watts) | +24 VDC (<3 watts) | +24 VDC (<3 watts) |
| Connector | 5 pin micro connector (power and comm.) | 9 pin Type D male (power and comm.) | 9 pin Type D male (power) 9 pin Type D female (comm.) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
| Data Rate Switch/Selection | 4 positions: 125, 250, 500K (Default) (programmable over network) |
No switch Set data rate via RS485 | No switch Set data rate via Profibus | No switch | No switch |
| Comm. Rate(s) | 125 Kbps; 250 Kbps; 500 Kbps | 9.6 Kbps; 19.2 Kbps 38.4 Kbps | 9.6 Kbps to 12 Mbps | 100 Mbps | 100 Mbps |
| MAC ID Switches/Addresses | 2 switches, 10 positions; 0,0 to 6,3 1 to 254 | Set address over RS485 Station Addresses 0,0 to 9,9 | 2 switches, 10 positions | 3 switches, 16 positions | N/A |
| Network Size | Up to 64 nodes | Up to 32 nodes | Up to 99 nodes | Up to 4095 nodes | N/A |
| Visual Indicators | LED Network (green/red) LED Module (green/red) |
LED Comm (yellow) LED Error (red) |
LED Comm (green/red) LED Error (green/red) |
LED Power (green) LED Run (green) LED Error (red) LED Comm (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
| Compliance | CE | CE | CE | CE | CE |
Wide Choice of Digital and Analog Interfaces
The GM50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
Standard 3 inch Footprint
The GM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.
Metal Sealed
The GM50A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.
Percent of Setpoint Accuracy
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
Embedded User Interface
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
Patented Thermal Sensor
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.
Resources
Literature
- GM51A, 1.125 in. wide, Metal Sealed, Mass Flow Controller, 5 sccm - 50 slm (553.1 kB, PDF)
- GM50A Metal-sealed, Digital Mass Flow Controllers (0, PDF)
Application Notes
- Accelerated Automotive Emission Control Catalyst Research (0, PDF)
- MFCs for Gas Control in Case Hardening Processes (246.3 kB, PDF)
- Gas Delivery in Biopharmaceutical Applications (271.8 kB, PDF)
- Gas Delivery for Plasma Spray Coating Applications (320.8 kB, PDF)
- Gas Delivery for Low-E Glass Coating Applications (530.2 kB, PDF)
- Sample Gas Codes for Mass Flow Controllers/Meters
- Gas Correction Factors for Thermal-based Mass Flow
Manuals
- G and I Series Mass Flow Controller/Meter Manual (2.2 MB, PDF)
- G-Series Mass Flow Controller/Meter DeviceNet™ Supplement (112.5 kB, PDF)
- G-Series Mass Flow Controller/Meter RS485 Supplement (149.3 kB, PDF)
- G-Series Mass Flow Controller/Meter PROFINET Communications Supplement (1 MB, PDF)
- G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement (86.9 kB, PDF)
- G-Series/I-Series MFC Modbus Register Map and Specification (502.9 kB, PDF)
- G-Series MFC Web Browser Tutorial (5.6 MB, PDF)
Drawings & CADs
- GM50A Mass Flow Controller/Meter 3D Model Files
- GM51A Mass Flow Controller/Meter 3D Model Files
- GM50A Mass Flow Controller Dimensional Drawing (336.4 kB, PDF)
Device Description Files
- GM50A EDS File (346.2 kB, EDS)
- GM50A ESI File (132 kB, XML)
- GM50A Profibus GSD File (1179B compatible) (2.5 kB, GSD)
- GM50A Profibus GSD File (1480 compatible) (2.6 kB, GSD)
- GM51A EDS File (346.2 kB, EDS)
- GM51A ESI File (132 kB, XML)
Ultra-High Velocity