925 Micro Pirani™ Vacuum Pressure Transducers
Overview
The 925 Micro Pirani™ vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 Micro Pirani™ offers analog voltage output, digital interface and set point relays for process controlling.
- Absolute measurement range from 10-5 Torr to Atmosphere
- MicroPirani sensor is resistant to damage from air inrush or vibration
- Analog, RS232, RS485, & EtherCAT® versions
- Optional integrated touch-screen display available for local pressure indication
- Three optional set point relays for process control
Products
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925-11010 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB9, 1 Relay |
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Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB9, 1 Relay
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925-11014 Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB9, 1 Relay |
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925-11020 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB15 |
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925-11024 Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15 |
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925-11030 Vacuum Pressure Transducer, NW16 ISO-KF, RS232, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15, 3 Relays
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925-11034 Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15, 3 Relays |
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925-12020 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS485, DB15 |
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925-12024 Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS485, DB15 |
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925-12030 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS485, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS485, DB15, 3 Relays
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925-12034 Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS485, DB15, 3 Relays |
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925-17020 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, EtherCAT |
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925-21020 Vacuum Pressure Transducer, MicroPirani, NW25 ISO-KF, RS232, DB15 |
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925-21024 Vacuum Pressure Transducer, MicroPirani, Display, NW25 ISO-KF, RS232, DB15 |
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925-21030 Vacuum Pressure Transducer, MicroPirani, NW25 ISO-KF, RS232, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, NW25 ISO-KF, RS232, DB15, 3 Relays
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925-21034 Vacuum Pressure Transducer, MicroPirani, Display, NW25 ISO-KF, RS232, DB15, 3 Relays |
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925-22020 Vacuum Pressure Transducer, MicroPirani, NW25 ISO-KF, RS485, DB15 |
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925-22024 Vacuum Pressure Transducer, MicroPirani, Display, NW25 ISO-KF, RS485, DB15 |
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925-22030 Vacuum Pressure Transducer, MicroPirani, NW25 ISO-KF, RS485, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, NW25 ISO-KF, RS485, DB15, 3 Relays
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925-22034 Vacuum Pressure Transducer, MicroPirani, Display, NW25 ISO-KF, RS485, DB15, 3 Relays |
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925-27020 Vacuum Pressure Transducer, MicroPirani, NW25 ISO-KF, EtherCAT |
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925-31010 Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS232, DB9, 1 Relay |
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Vacuum Pressure Transducer, MicroPirani, Display, 0.125 in. NPT-F RS232, DB9, 1 Relay
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925-31014 Vacuum Pressure Transducer, MicroPirani, Display, 0.125 in. NPT-F RS232, DB9, 1 Relay |
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925-31020 Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS232, DB15 |
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925-31024 Vacuum Pressure Transducer, MicroPirani, Display, 0.125 in. NPT-F, RS232, DB15 |
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Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS232, DB15, 3 Relays
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925-31030 Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS232, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, 0.125 in. NPT-F, RS232, DB15, 3 Relays
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925-31034 Vacuum Pressure Transducer, MicroPirani, Display, 0.125 in. NPT-F, RS232, DB15, 3 Relays |
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925-32020 Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS485, DB15 |
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925-32024 Vacuum Pressure Transducer, MicroPirani, Display, 0.125 in. NPT-F, RS485, DB15 |
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Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS485, DB15, 3 Relays
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925-32030 Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS485, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, 0.125 in. NPT-F, RS485, DB15, 3 Relays
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925-32034 Vacuum Pressure Transducer, MicroPirani, Display, 0.125 in. NPT-F, RS485, DB15, 3 Relays |
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925-37020 Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT, EtherCAT |
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925-41010 Vacuum Pressure Transducer, MicroPirani, 4 VCR-F, RS232, DB9, 1 Relay |
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925-41014 Vacuum Pressure Transducer, MicroPirani, Display, 4 VCR-F, RS232, DB9, 1 Relay |
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925-41020 Vacuum Pressure Transducer, MicroPirani, 4 VCR-F, RS232, DB15 |
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925-41024 Vacuum Pressure Transducer, MicroPirani, Display, 4 VCR-F, RS232, DB15 |
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925-41030 Vacuum Pressure Transducer, MicroPirani, 4 VCR-F, RS232, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, 4 VCR-F, RS232, DB15, 3 Relays
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925-41034 Vacuum Pressure Transducer, MicroPirani, Display, 4 VCR-F, RS232, DB15, 3 Relays |
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925-42020 Vacuum Pressure Transducer, MicroPirani, 4 VCR-F, RS485, DB15 |
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925-42024 Vacuum Pressure Transducer, MicroPirani, Display, 4 VCR-F, RS485, DB15 |
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925-42030 Vacuum Pressure Transducer, MicroPirani, 4 VCR-F, RS485, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, 4 VCR-F, RS485, DB15, 3 Relays
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925-42034 Vacuum Pressure Transducer, MicroPirani, Display, 4 VCR-F, RS485, DB15, 3 Relays |
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925-47020 Vacuum Pressure Transducer, MicroPirani, 4 VCR-F, EtherCAT |
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925-51020 Vacuum Pressure Transducer, MicroPirani, 8 VCR-F, RS232, DB15 |
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925-51024 Vacuum Pressure Transducer, MicroPirani, Display, 8 VCR-F, RS232, DB15 |
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925-51030 Vacuum Pressure Transducer, MicroPirani,8 VCR-F, RS232, DB15, 3 Relays |
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Vacuum Pressure Transducer, MicroPirani, Display, 8 VCR-F, RS232, DB15, 3 Relays
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925-51034 Vacuum Pressure Transducer, MicroPirani, Display, 8 VCR-F, RS232, DB15, 3 Relays |
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925-52024 Vacuum Pressure Transducer, MicroPirani, Display, 8 VCR-F, RS485, DB15 |
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925-52034 Vacuum Pressure Transducer, MicroPirani, 8 VCR-F, RS485, DB15, 3 Relays |
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925-57020 Vacuum Pressure Transducer, MicroPirani, 8 VCR-F, EtherCAT |
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925-67020 Vacuum Pressure Transducer, MicroPirani, 1.33 in. CF, EtherCAT |
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925-87020 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF Extended, EtherCAT |
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Configuration Options
The following options are available for 925 Vacuum Pressure Transducers
Ordering Code Example: 925-11030
| Configuration Option | Option Code |
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| 925 Vacuum Pressure Transducer | 925 |
Fitting |
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| NW16 ISO-KF | 1 |
| NW25 ISO-KF | 2 |
| 1/8 in. NPT male | 3 |
| 4 VCR female | 4 |
| 8 VCR female | 5 |
| 1.33 in. OD CF | 6 |
| NW16 ISO-KF, extended | 8 |
Communication |
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| RS232 | 1 |
| RS485 | 2 |
| EtherCAT | 7 |
Analog Output |
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| 1-9 VDC | 0 |
Relays |
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| 1 relay | 1 |
| No relay | 2 |
| 3 relays | 3 |
| 3 relays, dual analog out | 5 |
Display |
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| No display | 0 |
| Display (not available with EtherCAT) | 4 |
Specifications
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Digital CommunicationRS485/RS232 (4800 to 230400 Baud)
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SensorMicroPirani™ (MEMS Thermal Conductivity)
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Relays3 relays SPDT(Optional)
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Installation OrientationAny
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Measurement Range1.0 x 10-5 Torr to Atmosphere
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Set Point Range5.0 x 10-4 Torr to 500 Torr
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Calibration GasAir, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, xenon, Neon
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Operating Temperature0° to 40°C (32° to 104°F)
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Maximum Bakeout Temperature85°C (185°F), non-operating
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Digital ControlsZero adjust, atmosphere adjust, pressure units, baud rate, address, factory default, gas type; set point functions: value, hysteresis, direction, enable analog output transducer status, switch, LED test
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Digital StatusPressure reading and units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions part number, manufacturer
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Analog Output1 to 9 VDC, 100Ω maximum output impedance, 1 volt/decade
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Analog Output Resolution16 bit
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Relay Contact Rating1 A @ 30VAC/DC, resistive
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Relay Response<100 msec maximum
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Power Requirements9 to 30 VDC, < 1.5 watts max
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Accuracy5 x 10-4 to 10-3 Torr ±10% of reading
10-3 to 100 Torr ±5% of reading
100 Torr to atm ±25% of reading -
Repeatability10-3 to 100 Torr ± 2% of reading
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Overpressure Limit3000 Torr absolute
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Internal Volume(KF16) 2.80 cc
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Exposed Materials304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton®, Low out gassing epoxy resin
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Electronic Casing and Flange304 stainless steel
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Weight170 g (KF 16)
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ComplianceCE
Features
Micro Pirani™ Sensor Technology
The 925 Transducer offers a wide measurement range from 1x10-5 Torr to atmosphere that is based on measurement of thermal conductivity. The MicroPirani sensor consists of a silicon chip with a heated resistive element forming one surface of a cavity. A cover on top of the chip forms the other surface of the cavity. Due to the geometry of the sensor, convection cannot take place within the cavity and consequently, the sensor is insensitive to the mounting position. Gas molecules are passed by diffusion only to the heated element where the heat loss of the gas is measured.
Common Gas Calibrations
Like all thermal conductivity sensors, the 925 is sensitive to gas type. To compensate for gas dependency, the MicroPirani has a number of common gas calibrations that can be selected via the digital interface. This makes it a simple solution for locating medium to fine leaks in vacuum systems. Calibration gases include: Air, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, Xenon, and Neon.
Analog Pressure Output
The 925 also has a analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or controlling. Other analog outputs and curves can be selected via the digital user interface.
Process Control Relays
The 925 has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps.
Optional Integrated Touch-screen Display
The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
PDR900 Power Supply & Display
The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. It can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications.
Resources
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual (129.6 kB, PDF)
- 925 MicroPirani™ Vacuum Transducer Setup Instructions for Standard Models (196.1 kB, PDF)
- 925 Vacuum Transducer Pin-outs (73.8 kB, PDF)
- 900 Series EtherCAT Communication Protocol Manual (20003335) (925.8 kB, PDF)
- 925 MicroPirani™ Transducer Manual (100017129, Rev K) (2.5 MB, PDF)
Drawings & CADs
- 925 MicroPirani™ Vacuum Transducer Dimensional Drawing (82.7 kB, PDF)
Literature
- 925 MicroPirani™ Transducer (302.9 kB, PDF)
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