910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducers
Overview
Designed specifically for wide-range pressure measurement applications, the 910 Transducer combines Piezo and Micro Pirani™ sensor technologies. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.
- Absolute pressure measurement from 1500 to 10-5 Torr
- Two sensors in a single transducer for wide measurement range
- Gas independent absolute pressure measurement from 11 to 1500 Torr
- Fast, accurate and repeatable pressure measurements reduces process cycle time
- Optional 3 set points with fast response time for reliable process control
- Optional integrated touch-screen display available for local pressure indication etc
Products
Configuration Options
The following options are available for 910 Vacuum Pressure Transducers
Ordering Code Example: 910-11030
| Configuration Option | Option Code |
|---|---|
| 910 Vacuum Pressure Transducer | 910 |
Fitting |
|
| NW16 ISO-KF | 1 |
| NW25 ISO-KF | 2 |
| 0.125 in. NPT male | 3 |
| 4 VCR female | 4 |
| 8 VCR female | 5 |
| 1.33 in. OD CF | 6 |
| NW16 ISO-KF, extended | 8 |
Communication |
|
| RS232 | 1 |
| RS485 | 2 |
Analog Output |
|
| 1-9.2 VDC | 0 |
Relays |
|
| No relays | 2 |
| 3 relays | 3 |
| 3 relays, dual analog out | 5 |
Display |
|
| No display | 0 |
| No display, IP54 | 2 |
| Display | 4 |
| Display, SI | 6 |
Specifications
-
Absolute Measurement Range1.0 x 10-5 to 1,500 Torr
-
Digital CommunicationRS485/RS232 (4800-230400 Baud)
-
SensorType 1: MicroPirani (MEMS Thermal Conductivity)
Type 2: Piezo Absolute (MEMS Diaphragm) -
Relays3 relays SPDT (optional)
-
Installation OrientationAny
-
Set Point RangeAbsolute: 5.0 x 10-4 to 1,500 Torr
-
Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
-
Operating Temperature0- 40°C (32-104°F)
-
Maximum Bakeout Temperature85°C (185°F), non-operating
-
Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
-
Digital StatusPressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
-
Analog Output1-9.2 VDC, 1 VDC/decade, 100Ω maximum output impedance (absolute pressure)
-
Analog Output Resolution16 bit
-
Relay Contact Rating1 A @ 30VAC/DC, resistive
-
Relay Response100 msec maximum
-
Power Requirements9-30 VDC, 150 ma, < 1.2 watts maximum
-
Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of reading
1 x 10-3 to 11 Torr ±5% of reading
11 to 1000 Torr ±0.75% of reading -
Repeatability5 x 10-4 to 10-3 Torr ±8% of reading
10-3 Torr to 11 Torr ±2% of reading
11 to 1000 Torr ±0.2% of reading -
Overpressure Limit2250 Torr (absolute)
-
Internal Volume2.8 cc (KF16)
-
Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
-
Electronic Casing and Flange304 stainless steel
-
Weight170 g (with KF 16 Flange)
-
ComplianceCE
Features
MicroPirani™ Sensor Technology
Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy.
Piezo Absolute Pressure Sensor
The Piezo is an absolute pressure sensor, providing a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from less than 1 Torr to 1500 Torr.
Analog Pressure Output
The 910 also has an analog pressure output of 1VDC/ decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface.
RS232 or RS485 Digital Communication
The 910 has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement.
Process Control Relays
The 910 has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the piezo measurement or the combined absolute MicroPirani/Piezo measurement.
Compact Design
The compact design of these vacuum transducers significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.
Optional Integrated Touch-screen Display
The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
PDR900 Power Supply & Display
The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. It can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications.
Resources
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual (129.6 kB, PDF)
- 910 Vacuum Transducer Pin-outs (25.9 kB, PDF)
- 910 DualTrans™ Transducer Manual (100017123, Rev. G) (2.6 MB, PDF)
- 900 Series EtherCAT Communication Protocol Manual (20003335) (925.8 kB, PDF)
Drawings & CADs
- 910 Vacuum Transducer Dimensional Drawing (66.8 kB, PDF)
Literature
- 910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer (297.3 kB, PDF)
- Vacuum Measurement Product Guide (711.5 kB, PDF)
Other
- 910 RoHS Certificate of Compliance (525.7 kB, PDF)
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