356 Micro-Ion® Plus Vacuum Pressure Transducers
Overview
The 356 Micro-Ion Plus Vacuum Gauge Module combines the new miniature Conductron Heat-Loss Sensor with proven Micro-Ion Gauge technology in the same vacuum envelope to extend pressure measurements from high vacuum to atmosphere. The Micro-Ion Plus design combines the control electronics and the gauge in a compact module that not only provides convenient high vacuum measurement, but is easy to interface to a control system.
- Extended measurement range from high vacuum to atmosphere
- Dual ion gauge filaments increase equipment uptime
- Two trip point relays for safety interlocking
- Optional local display aids in setup and diagnostics
- Available with RS-485 with analog output or DeviceNet™ digital interface
Products
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356001-YE-T Vacuum Gauge, Micro-Ion Plus, RS485, Yttria-coated Filament, NW25 ISO-KF |
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356002-TN-T Vacuum Gauge, Micro-Ion Plus, Display, RS485, Tungsten, NW25 ISO-KF Extended |
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Vacuum Gauge, Micro-Ion Plus, Display, RS485, Yttria-coated Iridium, NW25 ISO-KF
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356002-YE-T Vacuum Gauge, Micro-Ion Plus, Display, RS485, Yttria-coated Iridium, NW25 ISO-KF |
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356004-YE-T Vacuum Gauge, Micro-Ion Plus, DeviceNet, Yttria-coated Filament, NW25 ISO-KF |
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356005-YE-T Vacuum Gauge, Micro-Ion Plus, Display, DeviceNet, Yttria-coated, NW25 ISO-KF |
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356005-YG-T Vacuum Gauge, Micro-Ion Plus, Display, RS485, Yttria-coated, 2.75 in. CF |
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356006-TN Replacement Vacuum Gauge, Micro-Ion Plus, Tungsten, NW25 ISO-KF Ext. |
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356006-YD Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, NW16 ISO-KF |
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356006-YE Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, NW25 ISO-KF |
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356006-YF Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, 1.33 in. OD CF |
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356006-YG Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, 2.75 in. OD CF |
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356006-YH Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, 8 VCR Male |
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356006-YK Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, NW40 ISO-KF |
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356006-YL Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, NW40 ISO-KF Ext. |
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356006-YM Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, NW16 ISO-KF Ext. |
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356006-YN Replacement Vacuum Gauge, Micro-Ion Plus, Iridium, NW25 ISO-KF Ext. |
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Specifications
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Sensor TypeMicro-Ion® Gauge
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Measurement Range1 x 10-9 Torr to atmosphere
1 x 10-9 mbar to atmosphere
1 x 10-7 Pa to atmosphere
(Air and N2) -
Repeatability<5% of reading from 1 x 10-8 Torr to 50 Torr
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Accuracy<15% of reading from 1 x 10-8 Torr to 50 Torr (N2)
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FilamentYttria-coated iridium
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Operating Temperature10 - 40°C
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Bake Out Temperature150°C (with electronics removed)
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Storage Temperature-40 to 70°C
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RelaysTwo single-pole, double-throw relays (SPDT)
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Relay Contact Rating1 A at 30 VDC resistive, non-inductive
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Relay Response1 x 10-9 to 50 Torr; 1 x 10-9 to 70 mbar; 1 x 10-7 Pa to 7 kPa
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Power Requirements24 VDC ±15%, 26 W max
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Exposed Materials304 stainless steel, tantalum, tungsten, nickel, nickel iron alloy, borosilicate glass
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Case MaterialAluminum extrusion
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Internal Volume10.8 cc
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Weight567 gm (20 oz) with NW16KF flange
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Display2 digits plus exponent, green LED (optional)
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Ion Gauge DegasElectron bombardment, 3.75 W with 2-minute timer
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Ion Gauge Emission CurrentAutoranging
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Ion Gauge Auto On Setting2 x 10-2 Torr; 3 x 10-2 mbar; 3 Pa, on decreasing pressure
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Ion Gauge Auto Off Setting3 x 10-2 Torr; 4 x 10-2 mbar; 4 Pa, on increasing pressure
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Switch to Low Emission Setting1 x 10-5 Torr; 1 x 10-5 mbar; 1 x 10-3 Pa, on increasing pressure
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X-ray Limit<3 x 10-10 Torr; <4 x 10-10 mbar; <4 x10-8 Pa
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ComplianceCE
Features
The combination of two sensors in the same vacuum envelope saves space. Vacuum system control is simplified by using the heat-loss sensor to automatically turn-on and turn-off the ionization gauge. The patented Conductron Heat Loss Sensor is based on the understanding and insights gained in over 35 years of experience in making the industry standard Convectron® Gauge. The wide range, high performance and compact size make the Micro-Ion Plus Module a wise choice for pressure measurement on high vacuum systems.
Micro-Ion® Plus Gauge
- Compact Combination Gauge: Micro-Ion Plus combines the new miniature Conductron Heat-loss sensor with a Micro-Ion sensor in one gauge envelope, at less than 10% of the volume of a conventional ionization gauge.
- High Performance: The complete Micro-Ion design has been retained with the patented dual ion collector that increases the electron path length and ion collection efficiency, providing high performance in a small volume.
- Dual Ionization Sensor Filaments: Dual, burn-out resistant yttria-coated iridium filaments provide long gauge life. Unscheduled downtime is avoided by using the second filament as a back-up until the gauge can be replaced during regular maintenance procedures.
- Cooler Operation: At only 8% of the power consumption of a traditional glass or nude gauge, the Micro-Ion sensor generates much less heat to disturb a process or experiment.
- Robust All-Metal Design: Welded components, vacuum fired and assembled in a cleanroom environment, are enclosed in a stainless steel envelope to ensure sensor integrity.
- Port Shield: Protects the electrode assembly from damage during assembly or vacuum chamber maintenance, and provides a stable electrical environment for improved measurement performance.
- Wide Selection of Vacuum Fittings: Simplifies installation on your vacuum system.
- Replaceable Gauge: Gauge can quickly and easily be replaced using only a screwdriver.
Micro-Ion® Plus Module
- Wide Measurement Range: Allows vacuum system performance to be monitored continuously from 1x10-9 Torr (1x10-9 mbar; 1x10-7 Pa) to atmosphere.
- Simple Modular Design: Electronics and sensors are packaged together in one compact, easy to install module that eliminates the need for multiple gauges, cables, and electronics.
- Control System Simplification: The integral heat loss sensor automatically controls activation and deactivation of the ion gauge, eliminating the need for external control of the ion gauge.
- RS-485, Analog Output and Remote I/O: In addition to RS-485 communications and analog output, the module provides input control of gauge on/off, degas, atmospheric calibration, and keyboard lock along with outputs of gauge, filament, and degas status.
- Process Trip Points: Relay contacts allow control of other vacuum equipment and provide safety interlocking. Settings are adjustable through the local display interface, RS-485 or DeviceNet interface.
- Local Display/Interface (Optional): Setup time and diagnostics are improved with a green LED display and pushbutton interface that gives point-of-use pressure indication and local adjustment of process trip points.
- DeviceNet Interface Version: Provides high speed access to pressure measurement and easy configuration of gauge parameters.
- DeviceNet Network Power Flexibility: Gauge power can be supplied either through the DeviceNet micro connector or through a separate connector.
Resources
Literature
- Vacuum Measurement Product Guide (711.5 kB, PDF)
- 356 Micro-Ion® Plus Modules (325.3 kB, PDF)
Manuals
- 356 Micro-Ion® Plus Module Operating Instruction Manual (72.7 kB, PDF)
- 356 Micro-Ion® Plus Gauge Removal and Replacement Procedure (187.7 kB, PDF)
- 356 Micro-Ion® Plus Module With DeviceNet™ Protocol Manual (1.3 MB, PDF)
- 356 Micro-Ion® Plus Vacuum Gauge Module Manual (1.1 MB, PDF)
Other
- 356 Micro-Ion® Module Declaration of Conformity (115 kB, PDF)
- 356 Micro-Ion® Plus Module Declaration of Conformity (121.8 kB, PDF)
Device Description Files
- 356 Micro-Ion® Plus Module DeviceNet™ EDS File (12.2 kB, EDS)
Ultra-High Velocity