355 Micro-Ion® Hot Cathode Vacuum Pressure Transducers
Overview
The MKS Micro-Ion® Transducer combines the world's smallest ionization gauge with the control electronics to create a compact, convenient, reliable, and cost-saving solution for many high vacuum applications. This Micro-Ion® vacuum gauge includes many features that provide for a much more accurate and repeatable measurement than traditional Bayard-Alpert gauges from 5 x 10-2 Torr to 10-9 Torr.
- Vacuum pressure measurement to 10-9 Torr
- Dual filaments increase equipment uptime
- Optional local display aids in setup and diagnostics
- Ultra-clean construction allows rapid response during pump down
- Rugged, all-metal, RF and noise-immune module is CE compliant
- Compact, convenient, reliable, cost-saving vacuum measurement
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
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355400-0-YE-T Hot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, Analog |
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355410-1-YE-T Hot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, RS485, 1 Relay |
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355420-2-YE-T Hot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, DeviceNet, 2 Relays |
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355600-0-YE-T Hot Cathode Vacuum Transducer, Display, Yttria, NW25 ISO-KF, Analog |
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Hot Cathode Vacuum Transducer, Display, Tungsten, 2.75 in. CF, DeviceNet, 2 Relays
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355620-2-TG-T Hot Cathode Vacuum Transducer, Display, Tungsten, 2.75 in. CF, DeviceNet, 2 Relays |
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Hot Cathode Vacuum Transducer, Display, Yttria, NW25 ISO-KF, DeviceNet, 2 Relays
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355620-2-YE-T Hot Cathode Vacuum Transducer, Display, Yttria, NW25 ISO-KF, DeviceNet, 2 Relays |
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Configuration Options
The following options are available for 355 Micro-Ion® Transducers
Ordering Code Example: 355410-1-YD-T
| Configuration Option | Option Code |
|---|---|
Base Module |
|
| Without display | 3554 |
| With display (Analog and DeviceNet only) | 3556 |
Interface |
|
| Analog | 00 |
| RS485 (No Display Option, Torr Units Only) | 10 |
| DeviceNet | 20 |
Relay Set Points |
|
| No Relay Set Points (Analog only) | 0 |
| 1 Relay Set Point (RS485 only) | 1 |
| 2 Relay Set Points (DeviceNet only) | 2 |
Filaments |
|
| Yttria-coated iridium | Y |
| Tungsten | T |
Flange/Fitting |
|
| NW16-KF | D |
| NW25-KF | E |
| NW40-KF | K |
| 1.33 in. (NW16-CF) ConFlat®-type | F |
| 2.75 in. (NW35-CF) ConFlat®-type | G |
| 0.5 in. VCR-type male | H |
Measurement Units |
|
| Torr | T |
| mbar | M |
| Pa | P |
The following options are available for 355 Micro-Ion® Replacement Sensors
Ordering Code Example: 355001-YE
| Configuration Option | Option Code |
|---|---|
Configuration |
|
| Series 355 Micro-Ion Transducer | 355001 |
Filaments |
|
| Yttria-coated iridium | Y |
| Tungsten | T |
Flange/Fitting |
|
| NW16-KF | D |
| NW25-KF | E |
| NW40-KF | K |
| 1.33 in. (NW16-CF) ConFlat®-type | F |
| 2.75 in. (NW35-CF) ConFlat®-type | G |
| 1/2 in. VCR-type male | H |
Specifications
-
TypeVacuum Transducer
-
SensorHot Cathode
-
Display2 digits plus exponent, green LED (optional)
-
Measurement Range1 x 10-9 to 5 x 10-2 Torr
1 x 10-9 to 7 x 10-2 mbar
1 x 10-7 to 7 Pa
(N2 or air) -
Operating Temperature0° to 40°C
-
Maximum Bakeout Temperature200°C maximum (with electronics removed)
-
Storage Temperature-40° to 70°C
-
Analog Output1 Volt/decade, logarithmic, 0 to 9 V
-
Power Requirements24 VDC ±15%, 12 W max
-
Internal Volume10.8 cc
-
Exposed Materials304 stainless steel, alumina, tantalum, tungsten, CuAg eutectic, Kovar
-
Electronic Casing and FlangeAluminum extrusion
-
Weight370 gm (12 oz) with NW16 KF flange
-
ComplianceCE, SEMI S2
-
Filamentyttria-coated iridium or tungsten
-
Connectors9-pin Type "D" male
-
Overpressure ProtectionGauge turns off at factory set upper pressure limit (adjustable)
-
Emission Current0.02 mA, 1.0 mA, or 4 mA
-
DegasElectron bombardment, 3 W with 2-minute timer
-
Remote Input SignalsFilament on/off, degas on/off and emission current are set by continuity to ground
-
Remote Output SignalsFilament and degas on/off status are determined by an open collector transistor
Features
Dual Filaments
Dual, burn-out resistant yttria-coated iridium filaments provide long gauge life. Unscheduled downtime is avoided by using the second filament as a back-up until the gauge can be replaced during regular maintenance procedures.
Ultra-Clean Construction
Micro-Ion gauges are designed, constructed, and processed to minimize outgassing. All components are vacuum fired and assembled in a Class 100 cleanroom environment. This assures rapid, repeatable response during vacuum chamber pumpdown.
Analog Output Version
The basic transducer version provides an easy-to-use analog output signal that is linear with the logarithm of the pressure. An optional large green LED display provides point-of-use pressure indication.
Analog Output Signal
Digital Interface Version
Transducers are available with an RS-485 or DeviceNet interface for easy compatibility with computer controlled processes. The digital interface versions have a set point relay allowing for control of other vacuum equipment or to provide a safety interlock.
Replacement Gauge
355 Micro-Ion® hot cathode vacuum transducers features a unique, no tools required detachable vacuum gauge. Please see 355 Micro-Ion® Hot-cathode Bayard-Alpert Vacuum Sensors for more information
Cooler Operation
At only 8% of the power consumption of a glass or nude gauge, the Micro-Ion gauge generates much less heat, minimizing the disruption to a process or experiment.
DeviceNet™ Interface Version Pinouts
Analog Output Version Pinouts
RS485 Version Pinouts
Resources
Literature
- Vacuum Measurement Product Guide (711.5 kB, PDF)
- 355 Micro-Ion® Vacuum Transducer (1.1 MB, PDF)
Drawings & CADs
- 355 Micro-Ion® Transducer Dimensional Drawing (260.6 kB, PDF)
Manuals
- 355 Micro-Ion® Transducer Analog or RS485 Quick Start (355279) (310 kB, PDF)
- 355 Micro-Ion® Transducer with RS485 Manual (626.4 kB, PDF)
- 355 Micro-Ion® Transducer with Analog Output Manual (355204) (604.2 kB, PDF)
- 355 Micro-Ion® Transducer with DeviceNet™ Quick Start (355280) (256.2 kB, PDF)
- 355 Micro-Ion® Transducer with DeviceNet™ Manual (355220) (1.2 MB, PDF)
Device Description Files
- 355T Micro-Ion® Module (no display) EDS File (20.1 kB, EDS)
- 355T Micro-Ion® Module (with display) EDS File (20.1 kB, EDS)
Other
- 355 RoHS Certificate of Compliance (543.2 kB, PDF)
Ultra-High Velocity