Specifications

  • Type
    Pressure Transducer
  • Sensor Type
    Capacitance Manometer
  • Measurement Type
    Differential
  • Full Scale Pressure Ranges
    0.2, 1, 2, 5, 10, 20, 50, 100, 200, and 1000 Torr and equivalents in kPa, mbar, inches H2O, and cm H2O
  • Output Signal
    0 - 1VDC, 0 - 5VDC, 0 - 10VDC > 10 k Ω load; or 2-wire 4-20 mA from +24VDC supply into < 500 Ω load
  • Fitting Type
    Standard: 1/4 inch OD (6.4 mm) tubes
    Optional: Various
  • Electrical Connector
    9-pin D-subminiature standard, terminal block and flying leads optional
  • Resolution
    0.01% of Full Scale
  • Accuracy
    0.50% of Full Scale unidirectional or bidirectional standard; 0.30% of Full Scale unidirectional or bidirectional, and 0.30% of Reading (unidirectional calibrations only)
  • Zero Temperature Coefficient
    0.1% Full Scale/°C for standard accuracy specification
  • Span Temperature Coefficient
    0.04% of Reading/°C
  • Sensor Internal Volume
    Measurement Side (Px): 1.4 cm
    Reference Side (Pr): 9.0 cm
    (when equipped with standard 1/4-inch (6.4 mm) O.D. inlet and reference tubes)
  • Ambient Operating Temperature
    0° to 50°C
  • Maximum Overpressure
    Measurement Side (Px): 120% of Full Scale or 20 psi (140 kPa), whichever is higher
    Reference Side (Pr): 120% of Full Scale
  • Maximum Line Pressure
    40 psig (275 kPa)
  • Materials Exposed to Process Gases
    Measurement Side (Px): Inconel
    Reference Side (Pr): Inconel, ceramic, palladium, stainless steel, glass
  • Power Requirements
    ±15VDC (±5%) or +13VDC to +30VDC @ 25 mA, ripple less than 20 mV
  • Compliance
    CE, SEMI S2

Resources

Manuals
Literature
Drawings & CADs
Application Notes

Need help?

Contact an Applications Specialist by sending us an email